Magnetic Levitation Substrate Transfer for Precise Clean Handling
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Solution Overview
Problem
Existing substrate transport systems face challenges in efficiently and accurately moving substrates between processing units while maintaining a stable, non-contact levitation and precise positioning, particularly in environments where traditional contact-based mechanisms may introduce contamination or inefficiencies.
Innovation Solution
A substrate transport system utilizing a linear transport device with a non-contact force generator, comprising actuators that apply magnetic forces to levitate and guide a floating unit, and a robot with an articulated arm to load and unload substrates, along with a controller for precise force control, ensuring independent and stable movement and positioning of substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If non-contact forces are used to levitate the floating unit, then dust emission is prevented, but transportation accuracy deteriorates due to position and posture variations
Solution Approach 1:
The system employs detection units that continuously monitor the position and posture of the floating unit, with controllers that adjust non-contact force application based on detected deviations. This closed-loop feedback mechanism maintains transportation accuracy despite the floating unit's position variations, while preserving the dust-free benefits of non-contact transport.
Solution Approach 2:
The system dynamically changes the parameters of non-contact forces (magnitude, direction, application points) based on real-time detection of the floating unit's state. By adjusting these parameters, the system compensates for position and posture variations, maintaining transportation precision while keeping the floating unit levitated for dust-free operation.
2Object-affected harmful factors
If non-contact forces are applied to levitate the floating unit, then dust emission is controlled, but device complexity increases due to multiple actuators and control systems
Solution Approach 1:
The non-contact force application unit serves multiple functions: it levitates the floating unit to prevent dust emission, positions the floating unit along the transport line, and adjusts posture. By consolidating these functions into a single multi-functional unit, the system reduces overall complexity while maintaining effective dust control.
Solution Approach 2:
The system uses the floating unit's own structure (with embedded detectors and force application points) to enable self-positioning and self-adjustment. This self-service approach reduces the need for external complex control mechanisms, simplifying the overall system while maintaining dust emission control.
3Ease of operation
If the floating unit is allowed to move freely under non-contact forces, then ease of operation is improved, but transportation accuracy deteriorates
Solution Approach 1:
The system transitions from a static, fixed-position transport mechanism to a dynamic system where the floating unit can move freely under controlled non-contact forces. Detectors continuously track the floating unit's position, and controllers dynamically adjust force application to maintain accuracy, combining ease of operation with positioning precision.
Solution Approach 2:
The system replaces traditional mechanical contact-based positioning mechanisms with non-contact force application and magnetic/electrical detection. This substitution enables free movement without mechanical constraints while maintaining positioning accuracy through field-based sensing and control, improving ease of operation without sacrificing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient, contamination-free transport and precise positioning of substrates between processing units, enhancing the reliability and efficiency of substrate handling in substrate processing systems.
Implementation Method 1
a non-contact force generator configured to apply a non-contact force to the floating unit from the moving base to cause the floating unit to follow movement of the moving base while levitating, by the non-contact force, the floating unit with respect to the moving base
Implementation Method 2
a first actuator that faces the floating unit along a first intersecting line intersecting the transport line and is configured to apply a first parallel non-contact force parallel to the floating unit
Implementation Method 3
a second actuator that faces the floating unit along a second intersecting line intersecting the transport line and the first intersecting line and is configured to apply a second parallel non-contact force parallel to the floating unit
Data Source
AI summary
A substrate transport system comprises: a linear transport device configured to transport a substrate along a transport line; and a robot configured to receive the substrate from the linear transport device, load the substrate into a processing unit, unload the substrate from the processing unit, and deliver the substrate to the linear transport device, wherein the linear transport device comprises: a first moving body configured to move along the transport line; a second moving body configured to support the substrate; and a non-contact force generator configured to apply a non-contact force to the second moving body from the first moving body to cause the second moving body to follow movement of the first moving body while levitating, by the non-contact force, the second moving body with respect to the first moving body.