Magnetic Liquid Collection for Semiconductor Edge Metal Sampling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for collecting metal contaminants at the end portions of semiconductor devices are inaccurate and non-automatic, often resulting in contamination and defects due to the difficulty in precisely targeting and isolating metal impurities using wiping members or liquid sweeps.
Innovation Solution
A collecting device and method utilizing a magnetic field to hold and separate a liquid containing a magnetic fluid and a collecting liquid, allowing it to be precisely brought into contact with the end portion of a semiconductor substrate, enabling automatic and accurate collection of metal contaminants without the need for wiping members or additional solvents.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a wiping member impregnated with liquid is used to collect metal contaminants, then metal collection is possible, but accurate and automatic collection at the end portion is difficult
Solution Approach 1:
The patent replaces the manual wiping member with a magnetic field-based liquid holding system. The magnetic field generates a virtual container that automatically holds and positions the liquid without mechanical contact, enabling both high precision metal collection at end portions and full automation of the process.
Solution Approach 2:
The patent introduces a magnetic field as an intermediary between the liquid and the collection target. The magnetic field acts as a mediator to precisely position and hold the liquid at the end portion of the substrate without direct mechanical intervention, achieving both accuracy and automation.
2Manufacturing precision
If a liquid sweep method is used to collect metal contaminants, then collection is possible, but precise targeting of end portion metal impurities is difficult
Solution Approach 1:
The patent replaces complex mechanical positioning systems with a magnetic field-based liquid holding mechanism. The magnetic field can be precisely controlled to position the liquid exactly where needed on the substrate end portion, achieving high manufacturing precision without increasing device complexity.
Solution Approach 2:
The magnetic field serving unit performs multiple functions: it holds the liquid, positions it precisely, and controls its movement. This multi-functionality eliminates the need for separate mechanical positioning devices, reducing overall system complexity while maintaining high precision.
3Reliability
If a wiping member is used to collect metal, then collection is possible, but the process is non-automatic and prone to contamination
Solution Approach 1:
The patent replaces mechanical wiping members that require manual handling with an automated magnetic field-based liquid delivery system. This eliminates human contact and potential contamination while achieving full automation of the metal collection process.
Solution Approach 2:
The magnetic field automatically positions and delivers the liquid to the collection point without manual intervention. The system is self-regulating and self-positioning, ensuring consistent, contamination-free operation while maintaining full automation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for precise and automatic collection of metal impurities at the end portions of semiconductor devices, preventing contamination and ensuring accurate mass analysis by isolating the collecting liquid from the magnetic fluid, thus enhancing the reliability of semiconductor manufacturing processes.
Implementation Method 1
A magnetic field generating unit holds, by a magnetic field, a first liquid containing a magnetic fluid and a collecting liquid to bring the first liquid into contact with at least an end portion of the substrate
Implementation Method 2
A separating unit separates the collecting liquid from the first liquid
Data Source
AI summary
A collecting device includes a stage configured to place a substrate. A magnetic field generating unit holds, by a magnetic field, a first liquid containing a magnetic fluid and a collecting liquid to bring the first liquid into contact with at least an end portion of the substrate. A collecting unit collects the first liquid from the magnetic field generating unit. A separating unit separates the collecting liquid from the first liquid.