Magnetic Mask Carrier for Precise Substrate Alignment in Deposition
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Solution Overview
Problem
Existing deposition apparatuses face challenges in maintaining high accuracy alignment between a mask and a substrate during the deposition process, particularly due to the fixed nature of the mask in the deposition unit, which complicates precise alignment.
Innovation Solution
A transport carrier equipped with magnetic chucking means that can hold and align a mask in close contact with the substrate's film formation surface, allowing for simultaneous holding and transportation of both the mask and substrate while maintaining accurate alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the mask is fixed in the deposition chamber, then the device structure is simple, but alignment accuracy between mask and substrate deteriorates during substrate conveyance
Solution Approach 1:
The patent merges the mask holding function with the substrate transport carrier by equipping the carrier with magnetic chucking means that can simultaneously hold both the substrate and the mask. This integration allows the mask to move with the substrate during conveyance, maintaining alignment accuracy while avoiding the need for separate fixed mask mounting structures in the deposition chamber.
Solution Approach 2:
The patent transitions from a static fixed mask structure to a dynamic system where the mask is held by magnetic chucking means on the moving carrier. This dynamic holding mechanism allows the mask to be positioned and aligned with the substrate before deposition, and maintains this alignment during transport, resolving the contradiction between structural simplicity and alignment precision.
2Stability of the object's composition
If the mask is held by fixed mounting, then the mask position is stable, but alignment adjustment during substrate transport becomes difficult
Solution Approach 1:
The patent performs alignment adjustment in advance before substrate transport by using the magnetic chucking means to hold and position the mask relative to the substrate on the carrier. This preliminary alignment action ensures that the mask and substrate are correctly positioned before conveyance begins, maintaining stability during transport while enabling easy adjustment prior to movement.
3Productivity
If substrate conveyance speed is increased to improve productivity, then manufacturing efficiency improves, but alignment accuracy between mask and substrate deteriorates
Solution Approach 1:
By merging the mask and substrate onto the same moving carrier, the patent eliminates relative movement between them during conveyance. Both components move together at the same speed, maintaining alignment accuracy regardless of conveyance speed, thus enabling high productivity without sacrificing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise alignment and deposition of films with high accuracy, improving the overall efficiency and quality of the film formation process in electronic device manufacturing.
Implementation Method 1
magnetic chucking means which magnetically chucks a mask that shields a non-deposition region of the substrate through the substrate
Data Source
AI summary
A transport carrier includes a carrier body being able to hold a substrate that is a deposition target, by which the substrate is transported in a deposition apparatus while being held, wherein the carrier body includes magnetic chucking means which magnetically chucks a mask which shields a non-deposition region of the substrate through the substrate and holds the mask in a state in which the mask has come into contact with a film formation surface of the substrate.