Magnetic Mask Holding Unit for Flatness and Alignment
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Solution Overview
Problem
Existing manufacturing methods for mask units face challenges in accurately fixing masks with varying rigidity to frames without distortion or sag, particularly in the context of organic EL display production, where precise alignment and thermal stability are crucial for vapor deposition processes.
Innovation Solution
A manufacturing device comprising a stage with a frame holding mechanism, alignment stages with lift-pins, a mask holding unit that uses magnetic forces to hold the mask flat, and a camera system for precise alignment, allowing for accurate positioning and fixing of the mask to the frame using lift-pins and a welder, ensuring high accuracy and thermal stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If a mask with varying rigidity is fixed to a frame using tension and clamps, then the mask can be held flat without distortion or sag, but the mask may experience tension-induced distortion and misalignment
Solution Approach 1:
The patent replaces the mechanical clamp-and-tension system with a magnetic field-based holding system. The mask holding unit generates a magnetic field that attracts and holds the mask flat against the frame without applying mechanical tension, thereby eliminating tension-induced distortion while maintaining flatness
Solution Approach 2:
The patent changes the physical state or property used for holding the mask from mechanical tension to magnetic attraction. By utilizing magnetic field strength as the holding parameter instead of mechanical tension, the system achieves flat mask positioning without the harmful effects of tension on mask alignment
2Stability of the object's composition
If multiple clamps are used to hold the mask with tension, then the mask remains flat during vapor deposition, but the complexity of the manufacturing device increases
Solution Approach 1:
The patent merges the functions of multiple clamps and tensioning mechanisms into a single mask holding unit that generates a magnetic field. This unified structure eliminates the need for multiple separate clamping components while maintaining stable mask positioning throughout the vapor deposition process
Solution Approach 2:
The patent replaces the complex mechanical system of multiple clamps and tensioning elements with a magnetic field generation system. This substitution significantly reduces the number of moving parts and structural components while achieving equivalent or superior stability in mask positioning
3Measurement precision
If the mask is held in a fixed position during alignment, then alignment precision can be achieved, but the mask cannot be adjusted for temperature compensation
Solution Approach 1:
The patent creates a dynamic mask holding system where the magnetic field strength can be adjusted. The mask holding unit can vary the magnetic attraction force to accommodate thermal expansion or contraction of the mask and frame, allowing the mask to maintain proper alignment across different temperature conditions while still achieving precise alignment
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise alignment and secure fixation of masks to frames, reducing distortion and misalignment due to temperature changes, and facilitating efficient vapor deposition processes for organic EL displays by maintaining the mask flat and avoiding tension-induced issues.
Implementation Method 1
a mask holding unit for holding the mask, the mask holding unit being arranged between the stage and the reference plate, and the mask holding unit holds the mask at a surface on the frame side
Implementation Method 2
the mask holding unit rises and falls above the alignment stage by the plurality of the lift-pins
Implementation Method 3
a camera for imaging a direction of the stage passing through the reference plate, wherein the camera images a first reference marker formed on the mask and a second reference marker formed on the reference plate
Implementation Method 4
a welder for fixing the mask to the frame when the mask is aligned with the frame
Data Source
AI summary
A manufacturing device for mask unit having a mask frame and a mask fixed to the mask frame includes a stage including a frame holding stage, and an alignment stage arranged with a plurality of lift-pins, a holding part for holding a reference plate arranged facing the stage, a mask holding unit, the mask holding unit being arranged between the stage and the reference plate, and a camera for imaging a direction of the stage passing through the reference plate, wherein the mask holding unit holds the mask at a surface on the frame side, the mask holding unit rises and falls above the alignment stage by the plurality of the lift-pins, the plurality of lift-pins includes a plurality of first lift-pins capable of contacting the mask holding unit, and the camera images a first reference marker on the mask and a second reference marker on the reference plate.