Magnetic Mask Support for Precise Display Deposition Alignment
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Solution Overview
Problem
The gap between the deposition mask and the deposition substrate in high-resolution display panel manufacturing leads to shadow defects and color mixing defects, which are prevalent in the production of high-resolution display devices like AR glasses and HMDs due to the weight of the mask membrane causing an increase in the gap.
Innovation Solution
A deposition apparatus is designed with a magnetic member and mask support system that uses magnets to fix the mask, reducing the gap between the deposition substrate and the mask, thereby minimizing shadow defects and color mixing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask membrane is formed of an inorganic film for high-resolution deposition, then the mask can provide the required structural stability and deposition quality, but the weight of the mask membrane causes the gap between the mask and deposition substrate to increase
Solution Approach 1:
The patent applies preliminary action by pre-forming a recess structure in the mask support before depositing the inorganic film. This recess is specifically designed to accommodate the mask membrane, ensuring that when the mask is assembled, the mask membrane sits at the correct position relative to the deposition substrate. This preliminary structural preparation prevents the gap formation that would otherwise occur due to the weight of the inorganic film mask membrane.
Solution Approach 2:
The patent changes the physical parameters of the mask support by creating a localized recess structure. This recess modifies the distance parameter between the mask and deposition substrate in the critical deposition region, compensating for the sagging effect caused by the weight of the inorganic film. The recess depth is specifically controlled to maintain the optimal gap distance for high-resolution deposition.
2Stability of the object's composition
If the gap between mask and deposition substrate increases due to mask membrane weight, then the mask structure remains stable, but shadow defects and color mixing defects occur in the deposited pattern
Solution Approach 1:
The patent applies segmentation by dividing the mask support into distinct functional regions: a stable base structure and a localized recess structure. The recess is segmented to align with specific deposition areas, allowing the mask membrane to be supported at critical points while maintaining overall structural stability. This segmented approach prevents uniform sagging that would cause shadow defects.
Solution Approach 2:
The recess structure acts as an intermediary element between the mask membrane and the deposition substrate. It provides localized support to the mask membrane, preventing excessive sagging in the deposition region while maintaining the overall stability of the mask structure. This intermediary structure eliminates the direct harmful effect of mask weight on deposition precision.
3Measurement precision
If a high-resolution deposition mask is used for 3000 PPI or more display panels, then the required resolution is achieved, but the mask membrane weight causes gap increase leading to defect formation
Solution Approach 1:
The patent applies preliminary action by pre-forming a recess structure in the mask support before depositing the inorganic film. This recess is specifically designed to accommodate the mask membrane, ensuring that when the mask is assembled, the mask membrane sits at the correct position relative to the deposition substrate. This preliminary structural preparation prevents the gap formation that would otherwise occur due to the weight of the inorganic film mask membrane.
Solution Approach 2:
The patent changes the physical parameters of the mask support by creating a localized recess structure. This recess modifies the distance parameter between the mask and deposition substrate in the critical deposition region, compensating for the sagging effect caused by the weight of the inorganic film.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces shadow defects and color mixing defects by maintaining a consistent alignment between the mask and substrate, enhancing the quality of high-resolution display panels.
Implementation Method 1
a magnetic member disposed on the first substrate and fixing the mask support with magnetic force
Implementation Method 2
vaporizing a deposition material included in the deposition source, passing the deposition material through the mask, and depositing the deposition material on the first substrate
Data Source
AI summary
A deposition apparatus includes a deposition source, a mask disposed between a first substrate and the deposition source, a mask support disposed between the deposition source and the mask and supporting at least a portion of the mask, and a magnetic member disposed on the first substrate and fixing the mask support with magnetic force. The magnetic member includes a plurality of magnets extending in a first direction. The mask support extends in a second direction perpendicular to the first direction.