Magnetic Structure Integration in Micromechanical Devices

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

The integration of magnetic structures into devices poses challenges due to conflicting requirements with other materials and operational conditions, such as temperature and contaminants during manufacturing, and specific operational conditions related to magnetic fields.

Innovation Solution

A magnetic device incorporating a magnetic structure with patterned layers of material having selected magnetic properties, combined with a device structure and circuit, to enhance device area utilization, manufacturability, reliability, and performance, while addressing conflicts with other elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If magnetic structures are integrated into devices with other materials (semiconductors, dielectric, metals), then device functionality is enhanced, but manufacturing requirements conflict due to temperature and contaminant constraints

Engineering Contradiction:

Improvedevice functionalityVSAvoidmanufacturing requirements

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The device is divided into separate functional modules: a magnetic device portion containing the magnetic structure and a semiconductor device portion containing other materials. These portions are formed in different regions of the substrate and can be manufactured independently according to their specific requirements, then integrated together. This segmentation allows each portion to be optimized for its own manufacturing constraints while achieving overall device functionality.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

An intermediary structure or interface region is introduced between the magnetic structure and other device elements. This intermediary layer or region acts as a buffer that accommodates the different manufacturing requirements of magnetic materials (which may require specific temperature ranges and contaminant control) and semiconductor materials (which have different processing requirements), enabling both to coexist in the same device without direct conflict.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If magnetic structures are integrated into devices, then device functionality is enhanced, but operational conditions are constrained by magnetic field path requirements

Engineering Contradiction:

Improvedevice functionalityVSAvoidoperational conditions

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The magnetic structure is designed with spatially varying properties: different regions of the magnetic structure have different magnetic characteristics (such as permeability, coercivity, or magnetization direction) optimized for their local function. This allows the magnetic field path to be guided and controlled locally through the structure, enabling the magnetic device to operate effectively without constraining the overall device operation, as each local region handles the magnetic field appropriately for its specific purpose.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables improved integration of magnetic structures, enhancing device performance, reliability, and cost-effectiveness by optimizing magnetic properties and interactions within the device.

Implementation Method 1

Manufacturing materials having specific magnetic properties, such as producing a magnetic field or having electrical properties that vary as a function of a magnetic field

Methodology Applied

Scientific EffectMagnetic field generation and response: Magnetism

Implementation Method 2

having electrical properties that vary as a function of a magnetic field

Methodology Applied

Scientific EffectMagnetoresistance: Magnetoresistance

Data Source

PatentUS11649157B2Devices, systems and methods including magnetic structures and micromechanical structure

Publication Date: 2023.05.16 ANALOG DEVICES INT UNLTD CO

AI summary

A magnetic device may include a magnetic structure, a device structure, and an associated circuit. The magnetic structure may include a patterned layer of material having a predetermined magnetic property. The patterned layer may be configured to, e.g., provide a magnetic field, sense a magnetic field, channel or concentrate magnetic flux, shield a component from a magnetic field, or provide magnetically actuated motion, etc. The device structure may be another structure of the device that is physically connected to or arranged relative to the magnetic structure to, e.g., structurally support, enable operation of, or otherwise incorporate the magnetic structure into the magnetic device, etc. The associated circuit may be electrically connected to the magnetic structure to receive, provide, condition or process of signals of the magnetic device.