Micromechanical Constituent Using Magnetic Actuation for Dual-Axis Deflection
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Solution Overview
Problem
Conventional micromirror apparatuses require electrostatic actuators and drive combs, which lead to undesired damping, increased moment of inertia, and the risk of flashovers due to high voltages, making them inefficient and prone to operational issues.
Innovation Solution
A micromechanical constituent that displaces a displaceable element, such as a micromirror, around two mutually inclined rotation axes using magnetic interactions alone, eliminating the need for electrostatic actuators and drive combs, and utilizing permanent magnets to produce both rotational and translational motions through magnetic fields.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If electrostatic actuators and drive combs are used to displace the micromirror, then the micromirror can be actuated around two rotation axes, but undesired damping and increased moment of inertia occur
Solution Approach 1:
The patent removes the drive combs from the micromirror structure, extracting the source of damping and moment of inertia increase. The micromirror is actuated directly through magnetic interactions between permanent magnets on the mirror and electromagnetic actuators, eliminating the need for drive combs that caused the harmful effects.
2Speed
If electrostatic actuators with high voltages are used, then resonant excitation can be achieved, but flashovers and material removal occur
Solution Approach 1:
The patent replaces the electrostatic actuation system with a magnetic actuation system. Instead of using high voltages to achieve resonant excitation, electromagnetic actuators generate magnetic fields that interact with permanent magnets on the micromirror, achieving the same resonant oscillation without the harmful high-voltage flashovers and material removal issues.
3Adaptability or versatility
If drive combs are included in the micromirror apparatus, then electrostatic actuation is enabled, but manufacturing complexity increases due to wiring requirements
Solution Approach 1:
The patent extracts and removes the drive combs and their associated wiring from the micromirror apparatus. The magnetic actuation system uses permanent magnets integrated directly into the micromirror structure, eliminating the need for complex wiring arrangements required by electrostatic drive combs and simplifying the manufacturing process.
4Force
If electrostatic actuators are used, then displacement motion can be produced, but the moment of inertia increases due to drive combs
Solution Approach 1:
The patent removes the drive combs that contribute to increased moment of inertia. The micromirror is directly actuated by magnetic forces between permanent magnets on the mirror and electromagnetic actuators, maintaining full displacement capability while minimizing the moment of inertia by eliminating unnecessary structural elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables large deflections with good effectiveness, reduces manufacturing complexity, avoids flashovers and material removal issues, and allows for resonant excitation without high voltages, resulting in a more reliable and efficient displacement mechanism.
Implementation Method 1
a magnetic field (18) is generated respectively at at least one first permanent magnet (16a) disposed on first spring element (12a) and at least one second permanent magnet (16b) disposed on second spring element (12b), in such a way that because of a magnetic interaction with magnetic field (18), a first rotational motion around first rotation axis (20) is imparted to the at least one first permanent magnet (16a)
Implementation Method 2
the at least one first permanent magnet (16a) is excited because of a magnetic interaction with magnetic field (18) to perform a first translational motion along first translation axis (26a), and the at least one second permanent magnet (16b) is excited because of a magnetic interaction with magnetic field (18) to perform a second translational motion along second translation axis (26b)
Implementation Method 3
at least one first spring element (12a) by way of which the at least one first permanent magnet (16a) is connected to mount (14), and at least one second spring element (12b) by way of which the at least one second permanent magnet (16b) is connected to mount (14)
Data Source
AI summary
A micromechanical constituent includes an actuator designed to impart to a displaceable element a first displacement motion around a first rotation axis and a second displacement motion around a second rotation axis oriented tiltedly with respect to the first rotation axis, the actuator including a permanent magnet on a first spring element and a one second permanent magnet on a second spring element, where the first permanent magnet is excitable to perform a first translational motion tiltedly with respect to the first rotation axis and tiltedly with respect to the second rotation axis, and the second permanent magnet is excitable to perform a second translational motion directed oppositely to the first translational motion, causing the second displacement motion of the displaceable element around the second rotation axis.