Magnetic Plasma Treatment for Reducing Line Edge Roughness
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Solution Overview
Problem
Existing plasma treatment methods struggle to effectively reduce the surface roughness of treatment targets, particularly in the line edge regions, due to insufficient deposition of plasma species, leading to inefficiencies in film formation on substrates like quartz glass.
Innovation Solution
A plasma treatment apparatus and method that utilizes a ferromagnetic body with a specific polarity placement between the treatment target and electrode, generating a magnetic field to guide plasma species into a spiral motion, enhancing deposition on both the upper and side surfaces of the target, thereby reducing roughness through controlled film formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional plasma treatment methods are used, then plasma species can be generated, but the deposition amount on side surfaces is insufficient leading to high surface roughness
Solution Approach 1:
The invention introduces a magnetic field dimension to control plasma species motion. By applying a magnetic field in the vertical direction, plasma species are forced to move in spiral paths, enabling them to reach side surfaces that are inaccessible through direct linear deposition from the upper direction.
Solution Approach 2:
The magnetic field acts as an intermediary between the plasma species and the side surfaces. It guides and redirects the plasma species along spiral trajectories, enabling effective deposition on vertical side surfaces without requiring direct mechanical contact or change in the physical structure of the treatment target.
2Manufacturing precision
If plasma treatment is applied to reduce surface roughness, then film formation can occur, but line edge roughness remains high due to insufficient plasma species deposition
Solution Approach 1:
The magnetic field adds a rotational dimension to plasma species trajectories, creating spiral motion that effectively covers vertical side surfaces and line edges. This dimensional change in motion pattern enables uniform film formation on previously difficult-to-treat regions.
3Manufacturing precision
If a ferromagnetic body with magnetic field is introduced, then plasma species deposition on side surfaces is enhanced, but device complexity increases
Solution Approach 1:
The ferromagnetic body serves as a compact intermediary that generates the necessary magnetic field within the existing plasma treatment chamber. This approach avoids the need for complex external magnetic field generation systems while achieving the desired spiral plasma species trajectories.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves significant reduction in surface roughness, including line edge roughness, by increasing the deposition of plasma species on both the upper and side surfaces of the treatment target, improving the quality of film formation on substrates.
Implementation Method 1
A plasma treatment apparatus and method that utilizes a ferromagnetic body with a specific polarity placement between the treatment target and electrode, generating a magnetic field to guide plasma species into a spiral motion
Implementation Method 2
a plasma treatment apparatus and method that utilizes a ferromagnetic body with a specific polarity placement between the treatment target and electrode
Implementation Method 3
enhancing deposition on both the upper and side surfaces of the target, thereby reducing roughness through controlled film formation
Data Source
AI summary
According to one embodiment, a plasma treatment apparatus includes a first chamber, an electrode provided in the first chamber and having a surface, and a conveyance mechanism that places a carrier structure holding a treatment target in the first chamber such that a ferromagnetic body of the carrier structure is disposed between the surface of the electrode and the treatment target. The ferromagnetic body has a single polarity within a plane substantially parallel to the surface of the electrode.