Magnetic Recording Medium Seed Layer Plasma Etching

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Solution Overview

Problem

The challenge in improving the magnetic recording medium's properties, particularly in achieving high recording density while maintaining thermal stability and reducing surface roughness, is exacerbated by the need for smaller magnetic crystal grain diameters, which can lead to decreased thermal stability and adverse effects on flying characteristics due to increased surface roughness.

Innovation Solution

A method involving the formation of a seed layer comprising (Mg1-xTix)O, followed by plasma etching in an inert gas atmosphere, and subsequent deposition of a magnetic recording layer with an L10 ordered alloy, which reduces surface roughness and orientation dispersion, enhancing magnetic anisotropy and read/write characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the grain diameter of magnetic crystal grains is reduced to increase recording density, then recording density is improved, but thermal stability of recorded magnetization decreases

Engineering Contradiction:
Improverecording densityVSAvoidthermal stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent changes the material composition parameter by using L10 ordered alloys (FePt, CoPt, FePd, CoPd) instead of conventional magnetic materials. These alloys have higher magnetocrystalline anisotropy, which compensates for the decreased thermal stability caused by reduced grain diameter, thereby maintaining reliable recording at higher densities

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite structures including L10 ordered alloy magnetic recording layers combined with specific underlayers (MgO, Cr, Ta) and interlayers. This composite approach optimizes both thermal stability and magnetic properties while enabling high-density recording with reduced grain sizes

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If plasma etching is performed to reduce surface roughness of the seed layer, then surface roughness is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvesurface roughnessVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent performs plasma etching of the seed layer as a preliminary step before forming the magnetic recording layer. This preliminary action reduces surface roughness and improves crystalline orientation of the subsequent magnetic layer, ensuring high manufacturing precision while integrating smoothly into the overall production process

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in improved crystallinity, reduced surface roughness, and enhanced magnetic properties such as increased magnetic anisotropy constant and coercive force, thereby improving the overall performance of the magnetic recording medium.

Implementation Method 1

plasma etching the seed layer in an atmosphere comprising inert gas

Methodology Applied
Scientific EffectPlasma etching: Plasma

Implementation Method 2

the magnetic crystal grains in the granular magnetic material need to be formed of a material with higher magnetocrystalline anisotropy

Methodology Applied
Scientific EffectMagnetocrystalline anisotropy: Anisotropy

Implementation Method 3

forming a magnetic recording layer comprising an ordered alloy onto the seed layer

Methodology Applied
Scientific EffectSputtering: Sputtering

Data Source

PatentUS10923150B2Method for producing magnetic recording medium
Publication Date: 2021.02.16 FUJI ELECTRIC CO LTD
  • US10923150B2 patent drawing
  • US10923150B2 patent drawing
  • US10923150B2 patent drawing

AI summary

The purpose of the present invention is to provide a magnetic recording medium having a stacked structure of a seed layer including (Mg1-xTix)O and a magnetic recording layer including an L10 ordered alloy, and having improved properties. The method for producing a magnetic recording layer according to the present invention includes the steps of: (1) preparing a substrate; (2) forming a seed layer including (Mg1-xTix)O onto the substrate; (3) plasma etching the seed layer in an atmosphere including inert gas; and (4) forming a magnetic recording layer including an ordered alloy onto the seed layer which has been subjected to the step (3).