Magnetic Recording Medium Fabrication via Transfer Container
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Solution Overview
Problem
Conventional magnetic recording medium fabrication methods face challenges in preventing the deterioration of layer quality due to the mixing of process gases with different physical properties during the formation of the protection and lubricant layers, while also struggling to maintain productivity.
Innovation Solution
A method and apparatus where the magnetic recording medium is formed with a transfer container unit that encloses the substrate after forming the protection layer, allowing for vapor-phase lubrication of the lubricant layer without exposing it to the atmosphere, thereby preventing gas mixing and improving productivity by separating the deposition chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the deposition line is arranged in a ring shape with continuous deposition chambers connected via gate valves, then productivity is improved by continuous layer formation, but manufacturing precision deteriorates due to mixing of process gases with different physical properties between the protection layer and lubricant layer formation
Solution Approach 1:
The continuous deposition line is segmented into separate sections with distinct vacuum chambers for forming the protection layer and lubricant layer. This segmentation allows independent control of process gases in each section, preventing gas mixing while maintaining continuous production flow through coordinated operation of multiple chambers.
Solution Approach 2:
An intermediary vacuum chamber with gas exhaust capabilities is introduced between the protection layer deposition chamber and the lubricant layer deposition chamber. This intermediary chamber acts as a buffer zone that exhausts residual process gas before the substrate enters the lubricant layer formation chamber, preventing gas mixing while maintaining continuous operation.
2Productivity
If the substrate is continuously transported through the deposition line with multiple chambers, then productivity is improved, but device complexity increases due to multiple gate valves and vacuum chambers required
Solution Approach 1:
The vacuum chambers are designed with multi-functionality to reduce overall system complexity. Each chamber can serve multiple purposes: deposition, gas exhaust, and substrate transfer. The gate valves are designed to perform both isolation and transfer functions, reducing the total number of separate components needed in the system.
Solution Approach 2:
Multiple functions are merged into single components and chambers. The deposition chambers are equipped with both deposition means and gas exhaust capabilities, eliminating the need for separate exhaust chambers. The gate valves serve dual purposes of chamber isolation and substrate transfer, reducing the number of separate control mechanisms required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents impurity mixing between the protection and lubricant layers, maintains layer quality, and enhances the productivity of the magnetic recording medium fabrication process by allowing for efficient cleaning of the transfer container unit without stopping the deposition apparatus.
Implementation Method 1
a vacuum deposition apparatus that carries out ion beam deposition is used to form the protection layer
Implementation Method 2
forming the lubricant layer on the stacked body within the vapor-phase lubrication deposition apparatus by vapor-phase lubrication
Data Source
AI summary
A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The stacked body is enclosed in a transfer container unit without exposing the stacked body to atmosphere after forming the protection layer on the stacked body by a deposition apparatus, and the transfer container unit is transported to a vapor-phase lubrication deposition apparatus. The stacked body is removed from the transfer container unit without exposing the stacked body to the atmosphere, in order to form the lubricant layer on the stacked body within the vapor-phase lubrication deposition apparatus.