Magnetic Repulsion Chuck for Plate Rotation
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Solution Overview
Problem
Conventional rotatable holding devices for plate-shaped articles in semiconductor manufacturing are complex, prone to structural and control issues, susceptible to centrifugal force and gravity, and result in particle generation during high-speed rotation, leading to product damage and inefficient cleaning processes.
Innovation Solution
A novel rotatory holding device featuring an annular rotatable chuck with a movable base and fixed base, utilizing magnetic repulsive forces between permanent magnets to rotate pivot pins for clamping and releasing the plate-shaped article, allowing for controlled clamping force and simplified motion control, thereby mitigating the effects of centrifugal force and gravity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional chuck pins are used with gear engagement or magnetic force to clamp the plate shaped article, then the article can be held and rotated, but the structure becomes complex and control becomes difficult
Solution Approach 1:
The patent replaces complex mechanical gear engagement systems and magnetic force systems with a simplified mechanical linkage system consisting of a movable base, fixed pins, and pivot pins. The movable base translates vertical motion into horizontal pin movement through geometric constraints, eliminating the need for gears, motors, and magnetic actuators while achieving reliable clamping.
Solution Approach 2:
The pivot pins automatically adjust their clamping force and position in response to the plate shaped article's presence and rotation. The geometric linkage between the movable base and pivot pins creates a self-regulating system where the pins naturally engage and disengage based on the base's vertical position, requiring no external control system.
2Speed
If conventional chuck pins are used during high speed rotation, then the article can be rotated, but the pins are affected by centrifugal force and gravity requiring extra design considerations
Solution Approach 1:
The fixed pins positioned opposite to the pivot pins create a counterbalancing effect. As the plate shaped article rotates, centrifugal force and gravity act on both pins simultaneously, and the opposite positioning ensures that the forces are balanced, maintaining clamping stability without requiring additional counterweight mechanisms or complex control.
3Reliability
If more chuck pins are used to ensure safe clamping, then clamping reliability improves, but particle generation increases due to friction among pins
Solution Approach 1:
The patent extracts only the essential clamping function from complex multi-pin systems. By using a minimal set of pivot pins that translate vertical motion into horizontal clamping action, the system achieves sufficient clamping safety while minimizing the number of moving parts and potential particle generation sources.
4Force
If electrostatic adhesion or gas cushion is used to hold the plate shaped article, then clamping force can be controlled, but the control system becomes complicated and expensive mechanisms are required
Solution Approach 1:
The patent replaces electrostatic adhesion systems and gas cushion mechanisms with a purely mechanical linkage system. The clamping force is controlled by the vertical position of the movable base, which translates linear motion into horizontal pin displacement through geometric constraints, achieving force control without complex control systems or expensive specialized mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves reliable and controlled clamping of plate-shaped articles, reducing particle generation and product damage, while simplifying the structure and motion control, ensuring effective cleaning and compatibility with various processing chambers.
Implementation Method 1
utilizing magnetic repulsive forces between permanent magnets to rotate pivot pins for clamping and releasing the plate-shaped article
Data Source
AI summary
A device for holding and rotating a plate shaped article comprises a group of fixed pins and a group of pivot pins arranged along the circumference of the movable base in a manner that each pivot pin opposites a fixed pin, and also comprises magnetic bodies positioned within and outside two opposing sides of the pivot pins. Each of the pivot pins can be driven to rotate around its pivot back and forth under the magnetic repulsive force between two adjacent magnetic bodies, so as to release or clamp the plate shaped article. The present invention has advantages of simple structure, convenient and reliable action control, controllable clamping force and good compatibility with various processing chambers.