Magnetic Sensor Asymmetric Electrode Positioning
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Solution Overview
Problem
Magnetic sensors with magnetoresistive elements on inclined surfaces face issues with reduced width, leading to smaller lower electrodes and increased risk of short circuits due to re-deposition films formed during ion milling, affecting the detection of magnetic fields perpendicular to the substrate.
Innovation Solution
A magnetic sensor design featuring a support member with an inclined portion and strategically positioned electrodes, where the magnetoresistive element is closer to the second end of the lower electrode than the first end, and the upper electrode is closer to the lower end of the inclined portion, with an etching mask having an undercut to manage re-deposition films effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If the width of the inclined surface is reduced to increase the occupation area of magnetoresistive elements, then the occupation area per unit area increases, but the width of lower electrodes becomes smaller and the distance from electrode ends to magnetoresistive elements decreases, leading to increased risk of short circuits due to re-deposition films
Solution Approach 1:
The patent positions the magnetoresistive element asymmetrically on the inclined surface, closer to one end of the lower electrode than the other. This asymmetric positioning in the longitudinal dimension compensates for the reduced width in the transverse dimension, ensuring adequate clearance from electrode ends even when the inclined surface width is reduced to increase occupation area.
Solution Approach 2:
The patent forms the magnetoresistive element at a predetermined asymmetric position on the inclined surface before subsequent electrode formation steps. This preliminary positioning ensures that even with reduced electrode width, the magnetoresistive element maintains sufficient distance from electrode ends, preventing short circuit issues that would arise from symmetric centering.
2Area of moving object
If magnetoresistive elements are located on an inclined surface to increase occupation area, then the occupation area per unit area increases, but the manufacturing complexity increases due to precise positioning requirements
Solution Approach 1:
The patent employs asymmetric positioning of the magnetoresistive element on the inclined surface, placing it closer to one end of the lower electrode rather than at the center. This asymmetric configuration simplifies manufacturing by providing clear positional guidance and reducing the precision requirements compared to symmetric centering, while still maximizing the occupation area on the inclined surface.
3Area of moving object
If the distance from electrode ends to magnetoresistive elements is reduced, then the occupation area increases, but re-deposition films formed during ion milling cause short circuits
Solution Approach 1:
The patent compensates for the reduced transverse distance (width direction) by utilizing the longitudinal dimension along the inclined surface. The magnetoresistive element is positioned asymmetrically closer to one end, creating sufficient longitudinal clearance that compensates for the reduced width, thereby preventing short circuits from re-deposition films while maintaining high occupation area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration prevents the occurrence of short circuits and maintains the desired characteristics of the magnetoresistive elements, allowing for increased occupation area per unit area while effectively detecting magnetic fields in multiple directions.
Implementation Method 1
a magnetoresistive element whose resistance changes with an external magnetic field
Implementation Method 2
by etching off outer peripheral ends of the lower electrodes by ion beam etching (ion milling) using an ion milling apparatus
Data Source
AI summary
A magnetic sensor includes an MR element and a support member. A top surface of the support member includes an inclined portion. The MR element includes an MR element main body, a lower electrode, and an upper electrode. The lower electrode includes a first end closest to a lower end of the inclined portion and a second end closest to an upper end of the inclined portion. The MR element main body is located at a position closer to the second end than to the first end.