Magnetic Sensor Inclined MR Elements for Precise Photoresist Formation
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Solution Overview
Problem
Existing sensors with sensor elements disposed on inclined surfaces face challenges in forming a photoresist layer with high accuracy due to the difficulty in increasing the inclination of the inclined surface for enhanced sensitivity to magnetic fields perpendicular to the substrate.
Innovation Solution
The sensor design includes a support member with a protruding surface featuring inclined surfaces, where the dimension of the protruding surface in the direction perpendicular to the substrate is between 1.4 μm and 3.0 μm, allowing for precise formation of a photoresist layer and enhancing sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the inclination of the inclined surface is increased to enhance sensitivity to magnetic fields perpendicular to the substrate, then the sensitivity of the magnetic sensor is improved, but it becomes difficult to form a photoresist layer on the inclined surface with high accuracy
Solution Approach 1:
The patent applies parameter changes by optimizing the height dimension of the protruding surface to a specific range (1.4 μm to 3.0 μm). This dimensional parameter adjustment allows the inclined surface to provide sufficient sensitivity enhancement while maintaining a manageable inclination angle that enables accurate photoresist layer formation during manufacturing.
2Measurement precision
If the dimension of the inclined surface in the direction perpendicular to the substrate surface is increased to enhance sensitivity, then the sensitivity of the magnetic sensor is improved, but the difficulty of forming a photoresist layer with high accuracy increases
Solution Approach 1:
The patent resolves this contradiction by establishing an optimal parameter range for the protruding surface height (1.4 μm to 3.0 μm). Within this range, the inclined surface provides adequate sensitivity enhancement while maintaining manufacturability for photoresist layer formation, balancing performance requirements with manufacturing ease.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables accurate formation of a photoresist layer on inclined surfaces while increasing sensitivity to magnetic fields, improving the manufacturing process and performance of the sensor.
Implementation Method 1
Magnetic sensors using magnetoresistive elements have been used for various applications in recent years. A system including a magnetic sensor may be intended to detect a magnetic field containing a component in a direction perpendicular to the surface of a substrate by using a magnetoresistive element provided on the substrate.
Implementation Method 2
the magnetic field containing the component in the direction perpendicular to the surface of the substrate can be detected by providing a soft magnetic body for converting a magnetic field in the direction perpendicular to the surface of the substrate into a magnetic field in the direction parallel to the surface of the substrate
Data Source
AI summary
A magnetic sensor includes an insulating layer, a first MR element, and a second MR element. The insulating layer includes a protruding surface including first and second inclined surfaces. Each of the first and second MR elements includes a magnetization pinned layer and a free layer. The magnetization pinned layer and the free layer of the first MR element are disposed on the first inclined surface. The magnetization pinned layer and the free layer of the second MR element are disposed on the second inclined surface. The dimension of the protruding surface in a direction parallel to the Z direction is in the range of 1.4 μm to 3.0 μm.