Magnetic Sensor Assembly for Levitated Carrier Position Sensing
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Solution Overview
Problem
Conventional magnetic sensors interfere with the ability of substrate transfer systems to levitate and convey magnetically levitated carriers, complicating precise and reliable transportation in semiconductor processing.
Innovation Solution
A magnetic sensor design with opposing sensor elements configured to measure magnetic flux density in opposite directions, allowing for precise carrier positioning without disrupting levitation, using a base with magnets generating magnetic flux that passes through sensor elements in opposing directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional magnetic sensors are used to detect carrier position, then position detection capability is provided, but the magnetic fields generated by these sensors interfere with the ability of the substrate transfer system to levitate and convey the carrier
Solution Approach 1:
A non-magnetic membrane is introduced as an intermediary between the magnetic sensor and the carrier. The membrane allows magnetic flux to pass through while physically separating the sensor from the carrier, enabling position detection without the sensor's magnetic field directly interfering with the levitation process. The membrane acts as a mediator that transmits magnetic signals while isolating the interference source.
Solution Approach 2:
The magnetic sensor is designed with controlled magnetic field parameters - using weak permanent magnets instead of strong electromagnets. By changing the strength and configuration parameters of the sensor's magnetic field, the system achieves sufficient position detection capability while minimizing interference with the carrier levitation. The sensor uses Hall effect or magnetoresistive elements that can detect position with weaker magnetic fields.
2Measurement precision
If magnetic sensors are positioned close to the carrier for accurate detection, then measurement precision improves, but magnetic interference with levitation increases
Solution Approach 1:
The non-magnetic membrane serves as a mediator that enables the sensor to be positioned close to the carrier for accurate detection while preventing direct magnetic interference. The membrane's permeability to magnetic flux maintains detection accuracy, while its physical presence as a barrier reduces the sensor's magnetic field impact on the levitation process.
Solution Approach 2:
The magnetic sensor uses localized weak magnetic fields at the sensor element level rather than strong global fields. Each sensor element (Hall effect or magnetoresistive) generates a localized magnetic field sufficient for detection but too weak to significantly interfere with levitation. This local quality approach allows close positioning without proportional increase in interference.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and reliable detection of carrier position without interfering with levitation, ensuring smooth conveyance in vacuum environments, enhancing semiconductor processing efficiency.
Implementation Method 1
The at least one magnet generating magnetic flux
Implementation Method 2
the first sensor element and second sensor element are configured to measure magnetic flux density
Data Source
AI summary
A magnetic sensor comprises a base, at least one magnet, a first sensor element, and a second sensor element. The base including a first side and a second side. The at least one magnet disposed over the first side of the base, the at least one magnet generating magnetic flux. The first sensor element and the second sensor element being disposed over the second side, wherein the first sensor element and second sensor element are configured to measure magnetic flux density, and the magnetic flux generated by the at least one magnet is configured to pass through the first sensor element in a first direction and pass through the second sensor element in a second direction that is opposite to the first direction.