Opposing-Element Magnetic Sensor Assembly for Levitated Carrier Positioning
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Solution Overview
Problem
Conventional magnetic sensors interfere with the ability of substrate transfer systems to levitate and convey magnetically levitated carriers, complicating precise and reliable transportation in semiconductor processing.
Innovation Solution
A magnetic sensor design with opposing sensor elements measuring magnetic flux density in opposite directions, positioned to detect the position of a magnetically levitated carrier without disrupting its levitation, using a base, magnets, and sensor elements configured to measure magnetic flux density.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional magnetic sensors are used to detect carrier position, then position detection capability is improved, but the ability of the substrate transfer system to levitate and convey the carrier is adversely impacted
Solution Approach 1:
The magnetic sensor is segmented into two separate sensor elements positioned on opposite sides of the magnetic field path. Each sensor element measures magnetic flux density in one direction, and their signals are combined to determine carrier position. This segmentation allows the sensor to detect position while minimizing interference with the levitation magnetic field.
Solution Approach 2:
The sensor elements are positioned at specific locations where they can detect magnetic flux density changes caused by carrier position variations, while their magnetic field influence is localized and minimized. The opposing configuration ensures that each sensor element operates in a region where it can detect position information without significantly disrupting the overall levitation field distribution.
2Measurement precision
If magnetic sensors are positioned to detect carrier position, then measurement capability is improved, but interference with the magnetic levitation field increases
Solution Approach 1:
The magnetic sensor acts as an intermediary that detects position information through magnetic flux density measurements without directly interacting with the levitation field. By measuring the magnetic field characteristics rather than directly engaging with the levitation mechanism, the sensor obtains position data while minimizing disruptive interference.
Solution Approach 2:
The two sensor elements are positioned asymmetrically on opposite sides of the magnetic field path, creating an asymmetric measurement configuration. This asymmetric arrangement allows the system to extract position information from the magnetic field gradient while the opposing positions cancel out some of the harmful magnetic interference effects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and reliable detection of carrier position without interfering with levitation, ensuring smooth conveyance in vacuum environments, enhancing semiconductor processing efficiency.
Implementation Method 1
the at least one magnet generating magnetic flux
Data Source
AI summary
A magnetic sensor includes a sensor housing, a magnet, a printed circuit board assembly, a first sensor element, and a second sensor element. The sensor housing includes a pocket and a magnet opening. The magnet is disposed in the magnet opening. The printed circuit board assembly is disposed in the pocket. The printed circuit board assembly includes a first portion and a second portion. The first sensor element and the second sensor element are disposed on the second portion. The first sensor element and second sensor element are configured to measure magnetic flux density, and the magnetic flux generated by the magnet is configured to pass through the first sensor element in a first direction and pass through the second sensor element in a second direction that is opposite to the first direction.