Magnetic Sensor Inclined Surfaces with Recesses for Precise MR Formation
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Solution Overview
Problem
Magnetic sensors with magnetoresistive elements on inclined surfaces face challenges in forming accurate sensor elements due to photoresist flowout at the end portions of these surfaces, affecting the precision and sensitivity of magnetic field detection.
Innovation Solution
The sensor design includes protruding portions with inclined surfaces featuring recessed structures at their ends, allowing for precise formation of magnetoresistive elements through controlled photoresist masking, enhancing the accuracy and sensitivity of magnetic field detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If magnetoresistive elements are formed on inclined surfaces to detect perpendicular magnetic field components, then sensitivity to perpendicular magnetic fields is improved, but manufacturing precision deteriorates due to photoresist flowout at end portions of inclined surfaces
Solution Approach 1:
The inclined surface is segmented into multiple regions by forming recess portions at the end portions. This segmentation prevents photoresist from flowing out continuously along the inclined surface, thereby maintaining manufacturing precision while preserving the sensitivity benefit of the inclined surface configuration.
Solution Approach 2:
Recess portions are introduced as intermediary structures at the end portions of the inclined surface. These recess portions act as barriers to photoresist flowout, enabling precise formation of magnetoresistive elements near the end portions while maintaining the inclined surface geometry needed for perpendicular magnetic field detection.
2Measurement precision
If more magnetoresistive elements are formed on inclined surfaces to enhance sensitivity, then sensitivity is improved, but manufacturing accuracy deteriorates due to photoresist flowout affecting electrode and element formation
Solution Approach 1:
By segmenting the inclined surface with recess portions, the patent enables formation of multiple magnetoresistive elements along the inclined surface without photoresist flowout compromising their accuracy. The recess portions create distinct formation zones for each element.
Solution Approach 2:
The recess portions serve as intermediary structures that prevent photoresist flowout, thereby enabling accurate formation of multiple magnetoresistive elements and their associated electrodes on the inclined surface without mutual interference.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The recessed structures enable accurate shaping of magnetoresistive elements, improving the precision and sensitivity of magnetic field detection, particularly in detecting components perpendicular to the substrate surface.
Implementation Method 1
Magnetic sensors using magnetoresistive elements have been used for various applications in recent years
Data Source
AI summary
A magnetic sensor includes an insulating layer including a flat portion and a protruding portion, a first MR element, and a second MR element. The protruding portion includes a first inclined surface and a second inclined surface. The first MR element is disposed on the first inclined surface. The second MR element is disposed on the second inclined surface. The protruding portion extends in a first direction parallel to a top surface of a substrate, and includes a plurality of recess portions each recessed in a direction parallel to the top surface of the substrate at an end of the protruding portion in the first direction.