Magnetic Sensor With Stacked Magnetoresistive Elements

The patent transitions from a two-dimensional parallel array of magnetoresistive elements on a substrate to a three-dimensional stacked configuration where elements are arranged in multiple layers along the vertical direction. This dimensional change allows simultaneous detection of magnetic fields at different spatial positions without the position shift problems inherent in planar arrays, as all elements can be positioned at the same lateral coordinates across different vertical levels.

The patent divides the measurement system into multiple independent magnetoresistive element units that can be positioned and controlled separately. Each unit contains magnetoresistive elements oriented in different directions, allowing independent detection of magnetic field components. This segmentation enables precise control of each element's detection position and timing, resolving the position accuracy issues that arise when multiple elements are arrayed together.

By arranging magnetoresistive elements in a three-dimensional stacked configuration rather than a dense two-dimensional planar array, the patent achieves high spatial resolution through vertical layering while maintaining consistent lateral detection positions. This eliminates the detection timing differences that occur in planar arrays where elements at different positions must be measured sequentially.

The patent combines multiple magnetoresistive elements with different detection axis orientations into integrated units where elements detect different components of the magnetic field simultaneously. By merging elements that would otherwise require separate measurement sequences into a single unified detection unit, the patent eliminates detection timing differences while achieving dense spatial sampling through the stacked configuration.

The patent employs a three-dimensional stacked arrangement of magnetoresistive element units, allowing simultaneous measurement of magnetic fields at multiple vertical positions without requiring sequential movement. All elements are fixed in their respective positions within the stack, enabling parallel detection that eliminates the time-consuming movement and repositioning required by conventional sequential measurement methods.

The magnetoresistive element units are pre-positioned in a fixed three-dimensional stack configuration before measurement begins. This preliminary arrangement of all detection elements at their final measurement positions eliminates the need for sequential movement during the measurement process, allowing all magnetic field components to be detected simultaneously at high speed while maintaining position accuracy.

The patent replaces the complex moving stage mechanism with a fixed three-dimensional stacked configuration of magnetoresistive element units. By utilizing the vertical dimension for arraying elements, the system achieves high detection position accuracy through precise manufacturing of the stack structure rather than through complex mechanical repositioning, thereby eliminating the moving stage and its associated complexity.

The patent extracts and removes the moving stage mechanism from the measurement system by adopting a fixed stacked configuration. The function of achieving high detection position accuracy is accomplished through the rigid, pre-positioned structure of the magnetoresistive element units in the vertical stack, eliminating the need for the separate moving stage subsystem and reducing overall device complexity.