Magnetic Sensor Electrode Shorting via Stepped MR Element

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Solution Overview

Problem

Magnetic sensors with magnetoresistive elements disposed on an inclined surface face a challenge of electrode shorting due to the small thickness of these elements and the corresponding small gap between lower and upper electrodes.

Innovation Solution

The magnetic sensor design includes a substrate with a reference plane and a support member with an inclined surface, featuring a magnetic detection element structure with a bottom surface, a top surface, and a first surface connecting them, which includes two steps to prevent electrode shorting.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If magnetoresistive elements are disposed on an inclined surface to enable detection of magnetic field components perpendicular to the substrate, then the sensor can detect magnetic fields in three dimensions, but the gap between lower and upper electrodes becomes relatively small increasing the risk of electrode shorting

Engineering Contradiction:

Improvedetection capabilityVSAvoidelectrode shorting risk

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent introduces a step structure on the side surface of the magnetoresistive element, adding a dimensional feature that creates horizontal separation between electrodes. This step structure extends the electrode gap in the horizontal direction while maintaining the inclined surface configuration for perpendicular magnetic field detection, thus resolving the contradiction between detection capability and electrode shorting risk.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Measurement precision

If the thickness of magnetoresistive elements is reduced to improve resolution, then measurement precision increases, but the gap between electrodes becomes smaller increasing the likelihood of shorting

Engineering Contradiction:

Improvemagnetic field detection resolutionVSAvoidelectrode shorting risk

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent segments the side surface of the magnetoresistive element into multiple portions by introducing a step structure. This segmentation creates distinct regions that separate the lower and upper electrodes horizontally, effectively increasing the electrode gap without increasing the element thickness, thus maintaining measurement precision while preventing electrode shorting.

Inventive Principle:

Principle #1Segmentation

3Power

If magnetoresistive elements are arranged in series with multiple lower and upper electrodes to improve signal output, then the sensor performance improves, but the complexity of electrode connections increases

Engineering Contradiction:

Improvesignal outputVSAvoidelectrode connection complexity

Core Design Contradiction:

PowerVSDevice complexity

Solution Approach 1:

The patent merges the electrode connection structures by integrating the step structure directly into the magnetoresistive element itself, eliminating the need for separate connection structures. This merging simplifies the overall device architecture while maintaining the series connection capability of multiple magnetoresistive elements, thus improving signal output without proportionally increasing device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively prevents electrode shorting in magnetic sensors with magnetoresistive elements on inclined surfaces, enhancing the reliability and performance of the sensors.

Implementation Method 1

the magnetic field containing the component in the direction perpendicular to the surface of the substrate can be detected by providing a soft magnetic body for converting a magnetic field in the direction perpendicular to the surface of the substrate into a magnetic field in the direction parallel to the surface of the substrate or locating the magnetoresistive element on an inclined surface formed on the substrate

Methodology Applied

Scientific EffectMagnetic field transformation: Magnetic Field

Implementation Method 2

As the magnetoresistive elements, TMR (tunneling magnetoresistive) elements or GMR (giant magnetoresistive) elements are used

Methodology Applied

Scientific EffectMagnetoresistance: Magnetoresistance

Data Source

PatentUS20250155531A1Magnetic sensor

Publication Date: 2025.05.15 TDK CORP

AI summary

A magnetic sensor includes a substrate including a top surface; an insulating layer disposed on the substrate, the insulating layer including first and second inclined surfaces each inclined with respect to the top surface of the substrate; and an MR element structure. An MR element is disposed on the first inclined surface or the second inclined surface. The MR element includes a bottom surface facing the first inclined surface or the second inclined surface, a top surface, and a first surface connecting the bottom surface and the top surface and including two steps.