Magnetic Shadow Mask Alignment for Thin-Film Battery Precision
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Traditional thin-film battery manufacturing methods using shadow masks face significant overhead and yield loss due to misalignment and mechanical instability, particularly in high-volume manufacturing where precise interlayer alignment is crucial.
Innovation Solution
A magnetic handling assembly and automated system for shadow mask fixation and alignment, utilizing a magnetic handling carrier and computer-controlled multi-axis stages to align and couple the shadow mask with the workpiece, reducing misalignment and mechanical instability through controlled magnetic coupling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional shadow mask methods are used for structured deposition of several layers, then pattern transfer can be achieved, but interlayer alignment accuracy deteriorates due to mechanical instability and misalignment
Solution Approach 1:
The patent replaces mechanical shadow mask handling with a magnetic field-based system. A magnetic handling carrier generates a magnetic field that couples with magnetic shadows on the substrate, enabling precise positioning and alignment without mechanical contact. This substitution eliminates mechanical instability and misalignment issues while maintaining pattern transfer capability.
Solution Approach 2:
The patent introduces a magnetic handling carrier as an intermediary between the shadow masks and the substrate. This carrier mediates the interaction by providing magnetic coupling through the substrate, enabling precise control of shadow mask positioning and alignment without direct mechanical contact, thereby improving interlayer alignment accuracy.
2Productivity
If shadow masks are frequently loaded and unloaded for each deposition operation, then different layers can be deposited, but overhead and yield loss increase
Solution Approach 1:
The patent merges multiple shadow mask operations into a single magnetic handling carrier system. The carrier can hold multiple magnetic shadows and transfer them to the substrate in sequence, eliminating the need to load and unload separate shadow masks for each deposition operation. This integration reduces overhead and time loss while maintaining the ability to deposit multiple layers with precise alignment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnetic handling assembly and automated system enhance the accuracy and efficiency of shadow mask alignment, minimizing yield loss and overhead, while maintaining high fidelity in pattern transfer during thin-film battery production.
Implementation Method 1
a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier
Implementation Method 2
aligning, with a computer-controlled multi-axis stage, a first pattern feature of the shadow mask to a second pattern feature of a workpiece by moving the first support a first distance relative to the second support
Data Source
AI summary
A magnetic handling assembly for thin-film processing of a substrate, a system and method for assembling and disassembling a shadow mask to cover a top of a workpiece for exposure to a processing condition. The assembly may include a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition. A system includes a first chamber with a first support to hold the shadow mask, a second support to hold a handling carrier, and an alignment system to align the shadow mask a workpiece to be disposed between the carrier and shadow mask. The first and second supports are moveable relative to each other.