Magnetic Shielding Board With Perpendicular Plates

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Solution Overview

Problem

In manufacturing industries, particularly in semiconductor fabrication plants, magnetic fields from surrounding sources can interfere with magnetism-sensitive equipment, affecting their operations and performance, as existing solutions fail to effectively shield these tools from diverse magnetic field directions.

Innovation Solution

A board comprising two magnetic conductive plates with perpendicular magnetic directions and a magnetic shielding structure, which concentrates and directs magnetic fields along specific directions while mitigating them in other directions, effectively shielding magnetism-sensitive tools by using materials like silicon steel and aluminum for enhanced magnetic shielding and mechanical protection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If traditional single-direction magnetic shielding is used, then shielding in one direction is effective, but shielding against magnetic fields from multiple directions is insufficient

Engineering Contradiction:
Improvemagnetic field interferenceVSAvoidshielding coverage against diverse magnetic field directions
Core Design Contradiction:
Object-affected harmful factorsVSAdaptability or versatility

Solution Approach 1:

The patent applies dimensionality change by transitioning from single-direction (one-dimensional) magnetic shielding to multi-directional (three-dimensional) shielding. This is achieved by arranging magnetic conductive plates in multiple orientations (vertical, horizontal, and inclined at various angles) to create a comprehensive shielding structure that addresses magnetic fields coming from different spatial directions, thereby resolving the contradiction between shielding effectiveness and adaptability to diverse magnetic field directions.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent segments the magnetic shielding function into multiple independent magnetic conductive plates positioned at different orientations. Each plate handles shielding in its specific directional orientation, and collectively they provide comprehensive multi-directional protection. This segmentation allows the system to effectively shield against magnetic fields from various directions without requiring a single complex shielding element.

Inventive Principle:
Principle #1Segmentation

2Object-affected harmful factors

If magnetic shielding structures are added to protect magnetism-sensitive tools, then magnetic field interference is reduced, but device complexity increases

Engineering Contradiction:
Improvemagnetic field interferenceVSAvoidshielding structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent applies universality by designing magnetic conductive plates that serve multiple functions: they provide magnetic shielding in their respective orientations, structural support, and can be integrated with existing equipment frameworks. This multi-functionality reduces the need for additional dedicated components, thereby minimizing the increase in device complexity while achieving comprehensive magnetic shielding protection.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the magnetic shielding function with the structural framework of the equipment by integrating magnetic conductive plates into the existing support structures and housings. This combination eliminates the need for separate, standalone shielding components, thereby reducing overall device complexity while maintaining effective magnetic field protection.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The described board configuration significantly reduces magnetic field interference, protecting magnetism-sensitive tools by concentrating and directing magnetic fields, thereby maintaining equipment efficiency and performance, as demonstrated by tests showing substantial reduction in magnetic field strength across various frequencies.

Implementation Method 1

The first magnetic conductive plate has a first magnetic conductive direction. The second magnetic conductive plate has a second magnetic conductive direction. The first magnetic conductive direction and the second magnetic conductive direction cross.

Methodology Applied
Scientific EffectMagnetic conduction: Magnetic Field

Implementation Method 2

The board at least partially shields the space S from the magnetic field

Methodology Applied
Scientific EffectMagnetic shielding: Magnetic Field

Data Source

PatentUS10104816B2Board, semiconductor fabrication plant (FAB) and fabrication facility
Publication Date: 2018.10.16 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10104816B2 patent drawing
  • US10104816B2 patent drawing
  • US10104816B2 patent drawing

AI summary

A board includes a first magnetic conductive plate and a second magnetic conductive plate. The first magnetic conductive plate has a first magnetic conductive direction. The second magnetic conductive plate overlaps with the first magnetic conductive plate. The second magnetic conductive plate has a second magnetic conductive direction. The first magnetic conductive direction and the second magnetic conductive direction cross.