Magnetic Spin Chuck Rotation for Airtight Wafer Drying

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing substrate processing systems face challenges in maintaining airtight seals under high-pressure conditions, leading to contamination and inefficiencies in drying processes, particularly during the removal of liquid materials from substrates like semiconductor wafers.

Innovation Solution

A substrate rotating apparatus with a spin chuck and stage configuration that allows for hermetic sealing and non-contact rotation, utilizing magnetic levitation and wireless communication for precise control, integrated within a high-pressure chamber to enhance drying efficiency and prevent contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional sealing mechanisms are used in high-pressure chambers, then the chamber can maintain pressure, but contamination occurs and airtightness deteriorates

Engineering Contradiction:

ImproveairtightnessVSAvoidcontamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent replaces conventional mechanical sealing systems with a magnetic field-based non-contact sealing mechanism. The spin chuck is levitated using magnetic forces between the first magnetic element on the spin chuck and the second magnetic element on the rotating part, eliminating mechanical contact and associated contamination while maintaining airtightness in the high-pressure chamber

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a magnetic field as an intermediary between the spin chuck and the rotating part to transmit rotational motion without physical contact. This magnetic coupling allows the spin chuck to rotate while being hermetically sealed from the chamber environment, preventing contamination while maintaining reliability

Inventive Principle:

Principle #24Intermediary (Mediator)

2Speed

If mechanical contact rotation is used, then rotation can be achieved, but substrate contamination occurs

Engineering Contradiction:

ImproverotationVSAvoidsubstrate contamination

Core Design Contradiction:

SpeedVSObject-affected harmful factors

Solution Approach 1:

The patent replaces mechanical contact rotation with magnetic field-based non-contact rotation. The rotation driver rotates the second magnetic element, which through magnetic coupling with the first magnetic element on the spin chuck, causes the spin chuck to rotate without any mechanical contact, thereby preventing substrate contamination while achieving the required rotation speed

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If control electronics are placed outside the high-pressure chamber, then airtightness is maintained, but control precision and response time deteriorate

Engineering Contradiction:

ImproveairtightnessVSAvoidcontrol precision

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent uses wireless communication as an intermediary to transmit control signals and data between the inner control unit inside the high-pressure chamber and external systems. This allows the control electronics to be hermetically sealed within the chamber while maintaining precise control through wireless signal transmission, resolving the contradiction between airtightness and control precision

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus achieves improved airtightness and efficiency in drying processes by maintaining a high-pressure environment while preventing substrate contamination, ensuring effective removal of liquid materials from substrates.

Implementation Method 1

a spin chuck configured to be levitated upward from the stage to rotate in a non-contact state with the stage. The stage may include an inner control unit configured to control rotation of the spin chuck

Methodology Applied

Scientific EffectMagnetic levitation: Maglev

Implementation Method 2

a wireless communication part configured to receive a control signal from an outside and configured to transmit the control signal to the inner control unit

Methodology Applied

Scientific EffectWireless communication: Electromagnetic Induction

Data Source

PatentUS12578647B2Substrate rotating apparatus, substrate processing system including the same, and substrate processing method using the same

Publication Date: 2026.03.17 SAMSUNG ELECTRONICS CO LTD

AI summary

A substrate rotating apparatus may include a spin chuck supporting a substrate and a stage rotating the spin chuck about an axis parallel to a first direction. The spin chuck may include a first magnetic element and a substrate supporting member thereon. The stage may include a stage housing, a rotating part rotating about the axis, an inner control unit controlling rotation of the rotating part, a power supplying part supplying a power to the rotating part, and a wireless communication part receiving a control signal from an outside and transmitting the control signal to the inner control unit. The rotating part may include a second magnetic element spaced apart from the first magnetic element and a rotation driver rotating the second magnetic element. The rotating part, the inner control unit, the power supplying part, and the wireless communication part may be placed in the stage housing.