Magnetically Preloaded Stage Assembly for High-Stiffness Motion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing stage assemblies for electronic components suffer from low stiffness during movement due to low vacuum forces in air bearings, which hinder manufacturing processes, or require increased volume and inertia with opposing air bearings.
Innovation Solution
A stage assembly incorporating a guide rail, carrier, linear motor, flux shield, and adjustable magnetic preload assemblies, along with air bearings, to provide enhanced stiffness and precise movement by utilizing ferromagnetic properties and adjustable magnetic preload forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If low vacuum force is used in air bearings to move the carrier, then the carrier can move along the guide rail, but the stiffness during movement is low which hinders manufacturing processes
Solution Approach 1:
A magnetic field is introduced as an intermediary force between the carrier and guide rail. Magnetic preload assemblies with adjustable strength create a magnetic attraction force that acts as a mediator, providing high stiffness and precise positioning while maintaining smooth movement through the air bearing layer.
Solution Approach 2:
The magnetic preload strength is made adjustable to optimize the balance between stiffness and movement smoothness. By changing the magnetic field strength parameter, the system can achieve high stiffness when needed while maintaining the ability to move smoothly along the guide rail.
2Strength
If opposing air bearings are used to increase stiffness, then the stiffness during movement improves, but the volume and inertia of the moving part increase significantly
Solution Approach 1:
The mechanical air bearing support system is replaced with a magnetic field-based preload system. Instead of using bulky mechanical structures or opposing air bearings to achieve stiffness, the invention uses magnetic attraction forces to provide the necessary stiffness and positioning precision without increasing the carrier's volume or inertia.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The assembly achieves high stiffness and precise, near-frictionless movement of electronic components, allowing for accurate manufacturing and inspection processes without the need for large volumes or increased inertia.
Implementation Method 1
one or more air bearings coupled to one of the carrier and the guide rail, the air bearings configured to provide pressurized air between the carrier and the guide rail to create a distance between the carrier and the guide rail
Implementation Method 2
one or more adjustable magnetic preload assemblies operatively coupled to the carrier, the adjustable preload assemblies configured to selectively adjust a distance between the carrier and the guide rail
Implementation Method 3
a flux shield formed of a ferromagnetic material and positioned between the stator assembly and the carrier
Implementation Method 4
a linear motor comprising a rotor and a stator assembly positioned along the length of the guide rail, the rotor operatively coupled to the carrier to actuate movement of the carrier along the length of the guide rail
Data Source
AI summary
A stage assembly for supporting and moving electronic components includes a guide rail. The stage assembly also includes a carrier for supporting an electronic component and moveable along a length of the guide rail. The stage assembly further includes a linear motor comprising a rotor and a stator assembly positioned along the length of the guide rail, the rotor operatively coupled to the carrier to actuate movement of the carrier along the length of the guide rail. The stage assembly yet further includes a flux shield formed of a ferromagnetic material and positioned between the stator assembly and the carrier. The stage assembly also includes one or more magnetic preload assemblies operatively coupled to the carrier.