Magnetic Storage Device Metal Nitride Protection Layer

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Solution Overview

Problem

Magnetic storage devices using magnetic nanowires face challenges in improving magnetic properties to enhance read accuracy and stabilize stored information, particularly due to deterioration of perpendicular magnetic anisotropy when using traditional metal cap layers with metal oxide layers like magnesium oxide.

Innovation Solution

Incorporating a protection layer of metal nitride or metal carbide, such as tantalum nitride (TaN), between the metal oxide layer and the magnetic storage layer to prevent oxygen deficiency and maintain crystallinity, thereby improving magnetic anisotropy and read accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a metal cap layer is used with a metal oxide layer, then the device structure is simplified, but the perpendicular magnetic anisotropy deteriorates due to oxygen deficiency

Engineering Contradiction:
Improvestructure complexityVSAvoidperpendicular magnetic anisotropy
Core Design Contradiction:
Device complexityVSStability of the object's composition

Solution Approach 1:

A protection layer made of metal nitride or metal carbide is introduced as an intermediary between the metal oxide layer and the magnetic storage layer. This protection layer acts as a barrier that prevents oxygen deficiency in the metal oxide layer, thereby maintaining the perpendicular magnetic anisotropy without requiring changes to the overall device structure

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent uses composite material structure by combining metal nitride or metal carbide with metal oxide in a layered configuration. This composite approach allows the metal oxide layer to maintain its oxygen-rich environment for high perpendicular magnetic anisotropy while the metal nitride/carbide layer provides protective functionality

Inventive Principle:
Principle #40Composite materials

2Reliability

If the metal oxide layer is used to induce perpendicular magnetization, then the magnetic storage function is achieved, but oxygen deficiency occurs leading to reduced read accuracy

Engineering Contradiction:
Improvemagnetic storage functionVSAvoidread accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The protection layer serves as a mediator that shields the metal oxide layer from oxygen depletion. By placing the metal nitride or metal carbide layer between the metal oxide and external environment, the oxygen-rich condition necessary for both perpendicular magnetization induction and high read accuracy is maintained

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If traditional cap layers are used, then manufacturing is easier, but the crystallinity of the metal oxide layer deteriorates

Engineering Contradiction:
Improvemanufacturing easeVSAvoidcrystallinity
Core Design Contradiction:
Ease of manufactureVSStability of the object's composition

Solution Approach 1:

The patent employs a composite cap structure where metal nitride or metal carbide is combined with metal oxide. This composite material approach maintains the ease of manufacturing through standard sputtering processes while the specific material combination preserves the crystallinity of the metal oxide layer, enabling high perpendicular magnetic anisotropy

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of metal nitride or metal carbide protection layers effectively reduces oxygen deficiency in metal oxide layers, maintaining high perpendicular magnetic anisotropy energy (Keff) and improving the stability and read accuracy of magnetic information in magnetic storage devices.

Implementation Method 1

the first layer includes at least one selected from the group consisting of a metal nitride and a metal carbide

Methodology Applied
Scientific EffectDiffusion barrier: Diffusion Barrier

Implementation Method 2

domain walls of the written magnetic domains are shifted by a current passed to the magnetic nanowire. Information is recorded in the magnetization directions of the magnetic domains

Methodology Applied
Scientific EffectMagnetic domain: Magnetism

Implementation Method 3

domain walls on a magnetic nanowire are shifted by a current passed to the magnetic nanowire

Methodology Applied
Scientific EffectSpin transfer torque:

Data Source

PatentUS10916318B2Magnetic storage device
Publication Date: 2021.02.09 KIOXIA CORP
  • US10916318B2 patent drawing
  • US10916318B2 patent drawing
  • US10916318B2 patent drawing

AI summary

A magnetic storage device of an embodiment includes: a first magnetic part including a first portion and a second portion and extending in a first direction from the first portion to the second portion; a layered part which is stacked on the first magnetic part in a second direction intersecting with the first direction; a first electrode electrically connected with the first portion; and a second electrode electrically connected with the second portion. The layered part includes a first layer and a second layer which is disposed between the first layer and the first magnetic part, the second layer includes a metal oxide, and the first layer includes at least one selected from the group consisting of a metal nitride and a metal carbide.