Magnetic Substrate Carrier Handling with Pneumatic Distance Control

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Solution Overview

Problem

Existing transport and handing-over arrangements for disc-shaped substrates are cumbersome, as they require anchor parts that interfere with substrate treatment, are not suitable for thin or dimensionally unstable substrates, and necessitate precise magnet adjustments between carrier and take-over arrangements.

Innovation Solution

A transport and handing-over arrangement featuring tray-shaped substrate carriers held by gravity, with controllable permanent magnets on a take-over arrangement that can adjust magnetic force to overcome the carrier's weight, allowing for independent handling of substrates regardless of form or stability, and incorporating pneumatic cylinders for robust distance control and elastic dampers for shock absorption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If anchor parts are attached to substrates for magnetic holding, then substrates can be transported on carrier, but anchor parts interfere with substrate treatment and must be removed

Engineering Contradiction:
Improvesubstrate transportVSAvoidinterference with substrate treatment
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The invention extracts the magnetic holding function from the substrate and relocates it to the carrier. The carrier is provided with magnetizable material that interacts with permanent magnets on the take-over arrangement, eliminating the need for anchor parts on the substrate. This resolves the contradiction by removing the harmful anchor parts while maintaining the transport function.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of attaching magnetic anchors to the substrate as in conventional solutions, the invention inverts the approach by placing magnetizable material on the carrier and using permanent magnets on the take-over arrangement. This reversal eliminates the need for substrate modifications and removes the interference problem.

Inventive Principle:
Principle #13The other way round (Inversion)

2Adaptability or versatility

If conventional magnetic holding is used, then substrates can be transported, but thin and dimensionally unstable substrates cannot be handled

Engineering Contradiction:
Improvesubstrate type compatibilityVSAvoidhandling stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The tray-shaped substrate carriers have sufficient weight to provide stable handling and positioning. The weight of the carriers compensates for the lack of rigid structure in thin substrates, providing the necessary stability for handling without requiring the substrates themselves to be rigid or dimensionally stable.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

3Ease of manufacture

If magnets are provided on both carrier and take-over arrangement, then magnetic forces can be adjusted, but the system becomes complex with precise magnet adjustments required

Engineering Contradiction:
Improvemagnetic force adjustmentVSAvoidmagnet adjustment system
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The invention extracts the permanent magnets from the carrier and relocates them exclusively to the take-over arrangement. The carrier is simplified to only contain magnetizable material and tray-shaped structures. This reduces the complexity by eliminating the need for precise magnet adjustments on the carrier while maintaining the magnetic holding function.

Inventive Principle:
Principle #2Taking out (Extraction)

4Productivity

If anchor parts are used for substrate holding, then magnetic transport is enabled, but the anchor parts must be removed after treatment

Engineering Contradiction:
Improvesubstrate transport efficiencyVSAvoidtime for anchor removal
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The invention extracts the magnetic holding mechanism from the substrate level and implements it at the carrier level. Since no anchor parts are attached to the substrates, there is no removal step required after treatment. This eliminates the time loss associated with anchor removal while maintaining efficient magnetic transport.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables simple, fast, and trouble-free handling of substrates of varying types and dimensions, reducing interference during treatment and eliminating the need for magnets on the carrier, while ensuring secure and gentle transfer with minimal mechanical stress.

Implementation Method 1

at least one permanent magnet is provided on the take-over arrangement. The distance between the at least one permanent magnet and the at least one part of magnetisable material on the substrate carrier is controllably variable... such that in a first distance position the magnetic force acting upon the substrate carrier is larger than the weight of the substrate carrier, in the second distance position, smaller

Methodology Applied
Scientific EffectMagnetic force: Magnetism

Implementation Method 2

The distance between the at least one permanent magnet and the at least one part of magnetisable material on the substrate carrier is controllably variable in two predetermined distance positions

Methodology Applied
Scientific EffectPneumatic actuation: Gas Compressor

Implementation Method 3

Tray-shaped substrate carriers are provided on the carrier surface, which are held on the carrier surface by their weight

Methodology Applied
Scientific EffectGravity: Gravitation

Data Source

PatentEP2862200B1Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture of treated substrates
Publication Date: 2020.10.07 EVATEC AG
  • EP2862200B1 patent drawingFigure 1~2
  • EP2862200B1 patent drawingFigure 3~4
  • EP2862200B1 patent drawingFigure 5

AI summary

A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).