Non-Contact Substrate Transport via Magnetic Coupling
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Solution Overview
Problem
Contact-type substrate transport devices in manufacturing processes are prone to ricochet and contamination due to mechanical abrasion and particle generation, while non-contact devices face high maintenance costs due to exposure to process environments and reaction products.
Innovation Solution
A substrate transport device using a carrier with second magnets inside the chamber and rotary wheels with first magnets outside, utilizing magnetic fields to move the carrier without contact, keeping driving parts outside the chamber and thus reducing contamination and maintenance costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If contact-type transport devices are used, then objects can be transported by mechanical means, but ricochet or yawing occurs due to abrasion and contamination by particles is caused
Solution Approach 1:
The patent replaces the mechanical contact-type transport system with a non-contact electromagnetic transport system. The electromagnetic transport device uses magnetic fields to propel substrates through the chamber without physical contact, eliminating abrasion and particle generation while maintaining reliable transport.
Solution Approach 2:
The patent introduces an electromagnetic field as an intermediary between the transport device and the substrate. The electromagnetic field acts as a mediator that transfers momentum and force without requiring direct mechanical contact, thus avoiding contamination while enabling transport.
2Object-generated harmful factors
If non-contact-type transport devices are used, then particle contamination is avoided, but driving parts remain susceptible to contamination by process environment and reaction products
Solution Approach 1:
The patent extracts the driving parts (electromagnetic coils and control mechanisms) from the process chamber environment and places them in a separate drive mechanism housing. Only the substrate and minimal necessary components remain in the chamber, isolating the sensitive driving parts from corrosive reaction products and process environment contamination.
Solution Approach 2:
The patent divides the transport system into two separate segments: a contamination-free chamber environment containing only the substrate and carrier, and a separate drive mechanism housing containing all electromagnetic driving parts. This segmentation allows each part to operate in its optimal environment.
3Productivity
If driving parts are disposed inside the chamber, then substrate transport can be achieved, but deposition of reaction products causes corrosion and increases maintenance cost
Solution Approach 1:
The patent extracts the driving parts from the process chamber and relocates them to a separate drive mechanism housing. This extraction prevents reaction products from depositing on and corroding the driving parts, thereby reducing maintenance costs while preserving substrate transport functionality.
4Productivity
If mechanical transport means are used, then substrate can be moved, but abrasion of parts occurs during transportation
Solution Approach 1:
The patent substitutes mechanical contact-based transport with an electromagnetic non-contact transport system. The electromagnetic force accelerates and moves substrates without physical contact, completely eliminating abrasion and particle generation while maintaining efficient substrate movement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures smooth movement of substrates within the chamber without particle generation or contamination, simplifies maintenance by isolating driving parts from the process environment, and prevents corrosion and abrasion, thereby enhancing the reliability and efficiency of substrate transport.
Implementation Method 1
The first magnets on the rotary wheels and the second magnets on the carrier create magnetic fields to interact each other
Implementation Method 2
The carrier is moved by magnetic non-contact forces
Data Source
AI summary
A substrate transport device includes a chamber, a rotary wheel, a first magnet, a carrier, and a second magnet. The rotary wheel is disposed outside the chamber. The first magnet is disposed on the rotary wheel. The carrier is disposed in the chamber. The second magnet is disposed on the carrier.