Magnetic Suppressor Electrode for Stable Electron Emission
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current electron sources in electron beam inspection systems experience emitter drift due to exposure to axial magnetic fields and heating, requiring frequent recalibration, which interrupts tool operation and wastes time.
Innovation Solution
Incorporation of a magnetic suppressor electrode formed from ferromagnetic materials to shield the electron emitter from axial magnetic fields, reducing emitter drift and allowing for reduced spherical and chromatic aberrations by positioning magnetic lenses closer to the emitter tip.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If non-magnetic materials are used for electrodes in axial magnetic fields, then smooth magnetic field structure is achieved, but emitter drift occurs over time requiring frequent recalibration
Solution Approach 1:
A magnetic suppressor electrode made of ferromagnetic material is introduced as an intermediary component between the electron emitter and the axial magnetic field. This suppressor electrode shields the emitter from the magnetic field, preventing emitter drift while allowing the magnetic field to remain unchanged for the electron beam extraction. The ferromagnetic material acts as a mediator that blocks the harmful magnetic field interaction without affecting the overall system operation.
2Stability of the object's composition
If magnetic suppressor electrode is added to shield emitter from axial magnetic field, then emitter drift is reduced, but device complexity increases
Solution Approach 1:
The magnetic suppressor electrode is designed to perform multiple functions: it shields the electron emitter from the axial magnetic field to prevent drift, and simultaneously serves as part of the electron source structure itself. By integrating the suppressor function into the existing electrode structure rather than adding a completely separate component, the design achieves magnetic shielding while minimizing the increase in overall device complexity.
3Manufacturing precision
If magnetic lenses are positioned closer to emitter tip, then spherical and chromatic aberrations are reduced, but emitter must be protected from magnetic field
Solution Approach 1:
The magnetic suppressor electrode acts as a protective intermediary that allows magnetic lenses to be positioned close to the emitter tip for improved beam focus precision. The suppressor electrode blocks the harmful magnetic field from reaching the emitter while permitting the magnetic lenses to operate in their optimal position for reducing spherical and chromatic aberrations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The magnetic suppressor electrode stabilizes the emitter position, minimizing the need for recalibration and extending the electron source's lifetime by isolating the magnetic and current fields, thus improving system efficiency and reducing maintenance time.
Implementation Method 1
a magnetic suppressor electrode surrounding at least a portion of the electron emitter, the magnetic suppressor electrode being formed from one or more magnetic materials, the magnetic suppressor being configured to shield at least a portion of the electron emitter from an axial magnetic field
Implementation Method 2
Electrons are emitted from the end point of needle-like metal wires, which are often heated to help induce the electron emission
Data Source
AI summary
An electron source is disclosed. The electron source may include an electron emitter configured to generate one or more electron beams. The electron source may further include a magnetic suppressor electrode surrounding at least a portion of the electron emitter. The magnetic suppressor electrode may be formed from one or more magnetic materials. The magnetic suppressor may be configured to shield at least a portion of the electron emitter from an axial magnetic field. The electron source may further include an extractor electrode positioned adjacent to a tip of the electron emitter.