Magnetic Switch Impedance Control for Precise Laser Pulse Timing
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Solution Overview
Problem
Existing photolithography systems using excimer lasers for deep ultraviolet (DUV) light production face challenges in maintaining consistent impedance of magnetic switching networks, leading to variations in light pulse generation and reduced precision in semiconductor substrate patterning.
Innovation Solution
A system with a controller that adjusts the impedance of magnetic cores in magnetic switching networks based on operating characteristics, using electrical currents to magnetically couple coils and reset the magnetic cores to specific saturation states, ensuring consistent impedance and precise light pulse generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If magnetic switching networks are used to activate excitation mechanisms in multi-stage laser systems, then light pulse generation is enabled, but impedance variations occur leading to reduced precision in light pulse production
Solution Approach 1:
The patent applies preliminary action by resetting the magnetic core to a specific saturation state before each light pulse generation cycle. The controller adjusts the impedance of the magnetic core in advance (before activating the excitation mechanism) based on operating characteristics, ensuring that the magnetic switching network starts from a known, consistent state. This pre-adjustment of impedance eliminates variations that would otherwise occur during operation, thereby maintaining precision in light pulse generation.
2Productivity
If magnetic cores are used in magnetic switching networks for light pulse generation, then excitation mechanisms can be activated, but impedance variations reduce burst mode performance and synchronization
Solution Approach 1:
The patent implements feedback by having the controller continuously monitor operating characteristics of the magnetic switching network and adjust the impedance of magnetic cores accordingly. The controller receives information about the operational state and modifies the impedance in real-time to maintain optimal performance. This feedback mechanism ensures that impedance variations are corrected dynamically, maintaining both burst mode performance and synchronization accuracy across multiple laser stages.
Solution Approach 2:
The controller adjusts the impedance of magnetic cores in advance before each excitation cycle based on predicted operating conditions. This preliminary impedance adjustment ensures that the magnetic switching network is optimally configured before light pulse generation begins, enabling consistent burst mode performance and precise synchronization without requiring complex real-time corrections during high-speed operation.
3Manufacturing precision
If impedance of magnetic cores is not adjusted, then system complexity is reduced, but predictability and accuracy of light pulse production deteriorate
Solution Approach 1:
The patent changes the electrical parameter (impedance) of the magnetic core dynamically based on operating characteristics. Instead of using a fixed impedance design, the system adjusts the impedance parameter in response to varying operational conditions such as temperature, frequency, and load. This parameter adjustment approach maintains high accuracy in light pulse production by adapting to real-world variations, while the control logic remains relatively simple by focusing on a single key parameter (impedance) rather than redesigning the entire system architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the predictability and accuracy of light pulse production, improving the burst mode performance and synchronization of multi-stage laser systems, thereby improving the precision and consistency of semiconductor substrate patterning.
Implementation Method 1
providing electrical current to one or more coils, each of the one or more coils being magnetically coupled to one of the one or more magnetic cores
Implementation Method 2
reset the magnetic cores to specific saturation states
Implementation Method 3
saturating the magnetic core such that an electrical pulse is provided to an excitation mechanism
Data Source
AI summary
One or more properties of an electrical quantity are determined based on one or more operating characteristics of an optical system that includes a laser system; an impedance of a magnetic core of a magnetic switching network is adjusted by providing the electrical quantity to a coil that is magnetically coupled to the magnetic core; and after adjusting the impedance of the magnetic core, a pulse of light is produced. Producing the pulse of light includes: saturating the magnetic core such that an electrical pulse is provided to an excitation mechanism of the laser system.