Magnetic Transfer Box Sealing for Particle-Free Coupling
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Solution Overview
Problem
Conventional semiconductor manufacturing systems face challenges in completely isolating fine particles and gas molecules due to mechanical rubbing and incomplete hermetical sealing, leading to contamination and increased manufacturing costs, despite the use of clean rooms and complex sealing mechanisms.
Innovation Solution
A coupling system with a transfer box and apparatus that uses magnetic forces for sealing, forming a hermetically sealed coupling chamber with only three sealing structures, eliminating the need for a fixed port and reducing the number of doors, thereby simplifying the structure and preventing contamination by fine particles and gas molecules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional mechanical sealing mechanisms are used with multiple doors and complex sealing structures, then the isolation of fine particles and gas molecules is attempted, but mechanical rubbing generates fine particles and hermetical sealing is incomplete, leading to contamination
Solution Approach 1:
The patent replaces conventional mechanical sealing mechanisms with magnetic sealing. Magnetic bodies are embedded in the transfer box door and apparatus door, creating hermetical sealing through magnetic attraction forces without mechanical contact. This eliminates mechanical rubbing that generates fine particles while achieving complete isolation of fine particles and gas molecules.
Solution Approach 2:
The patent eliminates the fixed port structure from the apparatus and removes the need for multiple doors. By using magnetic sealing between the transfer box and apparatus body, the system achieves hermetical sealing with only three sealing structures, significantly simplifying the overall structure while maintaining complete isolation.
2Reliability
If multiple doors and complex sealing structures are used to achieve hermetical sealing, then isolation of the interior space is improved, but the structure becomes more complex and manufacturing costs increase
Solution Approach 1:
The patent replaces complex mechanical sealing systems with a simplified magnetic sealing system. Magnetic bodies embedded in the transfer box door and apparatus door create hermetical sealing through magnetic attraction, eliminating the need for multiple mechanical seals and doors while achieving reliable isolation.
Solution Approach 2:
The patent merges the functions of multiple doors and sealing structures into a single integrated magnetic sealing system. The magnetic bodies in the transfer box door and apparatus door work together to create hermetical sealing, reducing the number of separate components while maintaining or improving sealing reliability.
3Ease of operation
If a fixed port structure is used in the apparatus, then transfer operations can be performed, but the structure requires multiple doors and complex sealing mechanisms to prevent contamination
Solution Approach 1:
The patent removes the fixed port structure from the apparatus entirely. Transfer operations are performed through magnetic sealing between the transfer box and apparatus body, eliminating the need for ports, multiple doors, and associated complex mechanisms while maintaining operational capability.
Solution Approach 2:
The patent replaces the mechanical port and door system with a magnetic sealing system. Magnetic bodies create hermetical sealing that enables transfer operations without requiring a fixed port structure, significantly simplifying the apparatus design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves complete isolation of fine particles and gas molecules, reducing manufacturing costs and complexity, while ensuring high cleanness and efficient transfer of products without the need for clean rooms.
Implementation Method 1
a transfer box door and a apparatus door with magnets or magnetic bodies; wherein the coupling system is structured in such a way that: the transfer box has a first sealing structure hermetically sealable by means of tight coupling of the transfer box body and transfer box door; the apparatus has a second sealing structure hermetically sealable by means of tight coupling of the apparatus body and apparatus door; the transfer box and apparatus have a third sealing structure hermetically sealable by means of tight coupling of both
Data Source
AI summary
A transfer box has a sealing structure hermetically sealable by means of tight coupling of a transfer box body and a transfer box door. The transfer box is structured in such a way that magnets on the transfer box body face magnetic bodies on the transfer box door when the transfer box door is closed on the transfer box body, with these magnets and magnetic bodies forming a magnetic closed circuit.