Magnetizable Phase Plate for TEM Imaging

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Solution Overview

Problem

Conventional phase plates for charged particle beam systems, such as transmission electron microscopes, face challenges in enhancing phase contrast for weak phase objects, including energy dependency, contamination, beam-induced charge-up, and difficulty in controlling phase shift, particularly at low spatial frequencies, which hinders effective imaging of biological samples.

Innovation Solution

A phase plate design featuring a magnetizable elongate member with a narrow cross-section that extends partially across a through-hole, introducing a spiral-like phase shift to charge carriers, allowing a wider range of spatial frequency components to pass through while reducing contamination and shadowing artefacts, and is fabricated using materials like nickel, cobalt, and iron.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a conventional phase plate (film-based or electrostatic lens) is used to enhance phase contrast, then phase contrast at low spatial frequencies is improved, but the device is prone to contamination, charge-up, and energy dependency

Engineering Contradiction:
Improvephase contrastVSAvoidcontamination and charge-up
Core Design Contradiction:
Illumination intensityVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the mechanical film-based phase plate or electrostatic lens system with a magnetic field-based phase plate. The magnetic field is generated by a magnetizable elongate member that creates a spiral-like phase shift in the electron wave without physical contact with the beam, eliminating contamination and charge-up issues while maintaining phase contrast enhancement

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental parameter from using physical thickness or electrostatic voltage to using magnetic flux density. The magnetic field strength and distribution are controlled by the magnetizable material properties and geometry, providing energy-independent phase shift control that avoids the limitations of conventional approaches

Inventive Principle:
Principle #35Parameter changes

2Illumination intensity

If a film-based phase plate is used, then phase contrast is enhanced, but it is difficult to control accurately the thickness and the phase shift

Engineering Contradiction:
Improvephase contrastVSAvoidthickness control
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

The patent substitutes the mechanical thickness-based phase shift mechanism with a magnetic field-based mechanism. Instead of controlling film thickness to achieve the desired phase shift, the invention uses magnetizable materials with specific remanent magnetization values that directly determine the phase shift, eliminating thickness control difficulties

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent transitions from controlling geometric parameter (film thickness) to controlling magnetic parameter (remanent magnetization). The phase shift is determined by the magnetic flux density which can be precisely controlled through material selection and magnetization processes, achieving accurate phase shift control without thickness measurement and control issues

Inventive Principle:
Principle #35Parameter changes

3Object-affected harmful factors

If the elongate member is made narrower to reduce contamination, then fewer spatial frequency components are blocked, but the phase shift control becomes more challenging

Engineering Contradiction:
ImprovecontaminationVSAvoidphase shift control
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The patent uses composite material structure combining a narrow magnetizable elongate member with a ferromagnetic material having specific magnetic properties. The composite approach allows the narrow geometry to minimize contamination and spatial frequency blocking while the ferromagnetic material provides sufficient magnetic flux for effective phase shift control

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent compensates for the reduced cross-sectional area by changing the magnetic parameter - using materials with high remanent magnetization values. This allows a narrow elongate member to generate adequate magnetic flux for phase shift control while maintaining the contamination-reducing narrow geometry

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances phase contrast at low spatial frequencies, reduces contamination, and minimizes shadowing artefacts, enabling clearer imaging of biological samples with improved contrast and reduced electron dose, thus overcoming the limitations of existing phase plates.

Implementation Method 1

an elongate member which is magnetisable in a direction along its length and which extends partially across the through-hole

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

introducing a spiral-like phase shift to charge carriers

Methodology Applied
Scientific EffectPhase shift: Phase Modulation

Data Source

PatentUS9076562B2Phase plate
Publication Date: 2015.07.07 HITACHI HIGH TECH CORP
  • US9076562B2 patent drawing
  • US9076562B2 patent drawing
  • US9076562B2 patent drawing

AI summary

A phase plate for a charged particle beam system, such as a transmission electron microscope (TEM), is described. The phase plate comprises a support having a through-hole and an elongate member which is magnetisable in a direction along its length and which extends partially across the through-hole and which is narrower than the through-hole.