Magnetizable Substrate Carrier for Vacuum Transport
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing transport and handing-over arrangements for disc-shaped substrates are cumbersome, as they require anchor parts that disturb substrate treatment, are not suitable for thin or dimensionally unstable substrates, and necessitate precise magnet adjustments, limiting their handling flexibility.
Innovation Solution
A transport and handing-over arrangement featuring tray-shaped substrate carriers made of magnetizable material, held by their weight, with a controllably movable take-over arrangement and variable magnetic force to facilitate easy transfer without the need for permanent magnets on the carrier, allowing for flexible handling of substrates of varying forms and thicknesses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If anchor parts are attached to substrates for magnetic holding, then substrate transfer is enabled, but substrate treatment is disturbed and anchor parts must be removed
Solution Approach 1:
The invention extracts the magnetic holding function from the substrate surface by attaching magnets to the carrier instead of using anchor parts on substrates. The carrier is made magnetizable and held by magnetic force from magnets on the carrier, eliminating the need for anchor parts that would disturb substrate treatment.
Solution Approach 2:
The invention introduces a magnetizable carrier as an intermediary between the substrate and the magnetic holding system. The carrier serves as a mediator that can be magnetically held and transferred, while the substrate itself remains free of anchor parts and can be treated without disturbance.
2Reliability
If permanent magnets are provided on both carrier and take-over arrangement, then magnetic holding is achieved, but device complexity increases and precise adjustments are required
Solution Approach 1:
The invention extracts the magnetic holding function from the take-over arrangement and relocates it to the carrier. Only the carrier needs permanent magnets, while the take-over arrangement uses electromagnetic actuators to control the magnetic field, simplifying the overall system.
Solution Approach 2:
The invention replaces the mechanical adjustment system with an electromagnetic control system. Electromagnetic actuators on the take-over arrangement can controllably generate and adjust magnetic fields without mechanical moving parts, eliminating the need for precise mechanical adjustments.
3Ease of operation
If substrates carry anchor parts for magnetic attachment, then transfer is possible, but thin and dimensionally unstable substrates cannot be handled
Solution Approach 1:
The invention extracts the magnetic attachment function from the substrate and relocates it to the carrier. The carrier is made magnetizable and held by magnetic force from magnets on the carrier, eliminating the need for anchor parts on substrates. This allows thin and dimensionally unstable substrates to be handled without requiring them to carry heavy anchor parts.
4Reliability
If magnetic force is increased for secure holding, then substrate retention is improved, but energy consumption increases
Solution Approach 1:
The invention uses periodic action by applying magnetic force only when needed for transfer operations. During substrate treatment, the magnetic holding is deactivated, and the carrier is held by mechanical support. This periodic activation reduces energy consumption while maintaining secure retention when required.
Solution Approach 2:
The invention makes the magnetic holding system dynamic and controllable. Electromagnetic actuators can adjust the magnetic field strength and activation timing based on operational requirements, optimizing the balance between retention security and energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simple, trouble-free handling of substrates independently of their type or stability, reducing disturbance during treatment and eliminating the need for anchor parts, while ensuring secure transfer with minimal mechanical complexity.
Implementation Method 1
at least one permanent magnet is provided on the take-over arrangement. The distance between the at least one permanent magnet and the at least one part of magnetisable material on the substrate carrier is controllably variable
Implementation Method 2
at least one part on the substrate carriers consists of magnetisable material
Data Source
AI summary
A method of manufacturing substrates using a transport and handing-over arrangement for disc shaped substrates, including a carrier and a take-over arrangement. A substrate carrier of magnetisable material has a peripheral protruding rim. An untreated substrate lies in the substrate carrier below the rim. The substrate carrier is taken-over from the take-over arrangement by controlling a distance between a permanent magnet and the substrate carrier and transported from to a treatment station. The controlled drive of the permanent magnets in the take-over arrangement is performed by means of pneumatic piston/cylinder arrangements.