Magnetically Actuated MEMS Switch with Integrated Coil
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Solution Overview
Problem
Existing magnetically actuated MEMS switches face challenges in miniaturization, high-speed switching, and preventing sticking between contact points, requiring external magnet mechanisms and larger device configurations.
Innovation Solution
A magnetically actuated MEMS switch design incorporating a conductor coil to apply a magnetic field to flexible magnetic core portions, allowing for controlled displacement of contact points and switching without an external magnet, enabling miniaturization and fast switching while preventing sticking by adjusting the magnetic field.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an external magnet mechanism is used to apply magnetic force to the MEMS switch, then the magnetic switching function is achieved, but the device configuration increases in size
Solution Approach 1:
The patent combines the magnetic field applying portion (coil) and the magnetic core portions into a single integrated structure. The coil is wound around the magnetic core, eliminating the need for separate external magnet mechanisms. This merging achieves both miniaturization and reliable magnetic switching function through the unified electromagnetic actuation system.
2Reliability
If a mechanism is provided to move a magnet in the vicinity of the MEMS switch, then magnetic actuation is achieved, but the device complexity increases
Solution Approach 1:
The patent replaces the mechanical magnet moving mechanism with an electromagnetic field application system. Instead of physically moving a magnet through mechanical means, a coil generates a magnetic field electrically to actuate the magnetic core portions. This substitution eliminates complex mechanical movement mechanisms while achieving reliable magnetic actuation.
3Productivity
If contact points are held together by magnetic force, then switching is achieved, but sticking between contact points occurs
Solution Approach 1:
The patent uses dynamic control of the magnetic field through the coil to achieve switching. By controlling the current in the coil, the magnetic field strength can be dynamically adjusted: strong enough to bring contact points together for switching, but reducible to allow separation. This dynamic magnetic field control enables reliable switching operation while preventing permanent sticking between contact points.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves miniaturization, fast switching, and effective prevention of sticking between contact points, enhancing the degree of freedom in device design and operation.
Implementation Method 1
a magnetic field applying portion that includes a conductor coil and causes a current to flow so that a magnetic field is applied to the first magnetic core portion and the second magnetic core portion
Implementation Method 2
a magnetic force is applied to a magnetic material such that the magnetic material is warped, and a first contact point provided in the magnetic material and a second contact point disposed to face the first contact point come into contact with each other
Data Source
AI summary
A magnetically actuated MEMS switch 100 includes a first magnetic core portion 120, a first signal line 15, a first contact point 16, a second magnetic core portion 220, a second signal line 25, a second contact point 26, and a first coil portion 111 and a second coil portion 211 serving as a magnetic field applying portion that causes a current to flow in conductor coil to apply a magnetic field to the first magnetic core portion 120 and the second magnetic core portion 220. The first contact point 16 is displaced depending on the presence or absence of a magnetic field applied by the magnetic field applying portion. Connection and disconnection between the first contact point 16 and the second contact point 26 are switched in response to displacement of the first contact point 16.


