Magneto-resistive Nano-scale Position Sensor for High Bandwidth
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Solution Overview
Problem
Current position sensors, such as optics, capacitors, and inductive coils, fail to provide sub-nanometer resolution and high bandwidth for micro-scale and macro-scale position sensing, while thermo-electric and piezo-resistive sensors suffer from low bandwidth.
Innovation Solution
A position sensing system utilizing a pair of magneto-resistive sensors configured to detect changes in a stray magnetic field created by a magnetic component, allowing for high-resolution and high-bandwidth position measurement, scalable to micrometer scales, and compatible with MEMS fabrication processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical, capacitor, or inductive coil sensors are used for position sensing, then accuracy and speed are achieved, but the sensors cannot scale down to micro-scales
Solution Approach 1:
The patent replaces optical, capacitive, and inductive sensing mechanisms with magneto-resistive sensing. The MR sensors detect position through changes in magnetic field interactions, enabling micro-scale positioning while maintaining high resolution and bandwidth. This substitution of the sensing physics enables successful scaling to micro-scales where conventional sensors fail.
2Adaptability or versatility
If thermo-electric or piezo-resistive position sensors are used, then scaling to micro-scale is achieved, but bandwidth is reduced
Solution Approach 1:
The patent changes the fundamental sensing parameter from thermal or piezoresistive effects to magneto-resistive effects. This parameter change enables the sensor to achieve both micro-scale scalability and high bandwidth operation, as the MR effect responds rapidly to magnetic field changes while maintaining compatibility with micro-fabrication processes.
3Productivity
If conventional position sensors are used, then high bandwidth is achieved, but sub-nanometer resolution is not attainable
Solution Approach 1:
The patent employs composite magneto-resistive sensor structures that combine multiple material layers with specific magnetic properties. This composite structure enables the sensor to achieve both high bandwidth response and sub-nanometer resolution by optimizing the magnetic interaction characteristics of the layered material system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves sub-nanometer resolution and bandwidth exceeding 1 MHz, enabling precise position sensing in micro- and macro-structures with scalability and cost-effectiveness, surpassing conventional sensors in both resolution and bandwidth.
Implementation Method 1
A position sensor and method include a magnetic component, a first magneto-resistive sensor disposed in proximity to the magnet/coil; and a second magneto-resistive sensor disposed in proximity to the magnetic component and the first magneto-resistive sensor
Implementation Method 2
The first magneto-resistive sensor and second magneto-resistive sensor are configured to sense changes in a stray magnetic field created by the magnetic component in accordance with a relative positional change
Data Source
AI summary
A position sensor and method include a magnetic component, a first magneto-resistive sensor disposed in proximity to the magnet/coil; and a second magneto-resistive sensor disposed in proximity to the magnetic component and the first magneto-resistive sensor. The first magneto-resistive sensor and second magneto-resistive sensor are configured to sense changes in a stray magnetic field created by the magnetic component in accordance with a relative positional change between the magnetic component and the first and second magneto-resistive sensors.


