Magnetoresistive Apparatus Laser Magnetization Structuring

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Solution Overview

Problem

Magnetoresistive apparatuses with small structure dimensions face challenges in achieving sufficient magnetization due to deflection of laser beams, resulting in low signal levels, especially when trying to create different reference magnetizations in various regions on a substrate, which is not possible with conventional homogeneous magnetization methods.

Innovation Solution

A method involving the formation of large structures on a substrate to define regions with the same magnetization, followed by laser magnetization to achieve high magnetization, and subsequent structuring to create smaller magnetoresistive elements with independent magnetizations, allowing for high signal capabilities even in small dimensions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If laser magnetization is used on small structures, then localized magnetization is achieved, but magnetization strength decreases due to beam deflection

Engineering Contradiction:
Improvelocalized magnetizationVSAvoidmagnetization strength
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies preliminary action by performing laser magnetization on large structures before structuring them into smaller elements. This sequence ensures that the magnetization process occurs when the structure is still large enough to maintain beam stability and achieve strong magnetization, while the subsequent structuring step creates the desired small dimensions for the final device.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If homogeneous furnace magnetization is used, then complete magnetization is achieved, but different reference magnetizations in different regions are not possible

Engineering Contradiction:
Improvemagnetization completenessVSAvoiddifferent reference magnetizations
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent applies segmentation by dividing the substrate into distinct regions separated by trenches before performing laser magnetization. This allows different regions to receive different magnetization treatments (different directions, strengths, or timing) while maintaining complete magnetization in each region. The trenches act as physical barriers that enable independent control of magnetization parameters in each segmented region.

Inventive Principle:
Principle #1Segmentation

3Length of moving object

If structure dimensions are reduced, then device miniaturization is achieved, but signal levels decrease due to lower magnetization

Engineering Contradiction:
Improvestructure dimensionVSAvoidsignal level
Core Design Contradiction:
Length of moving objectVSReliability

Solution Approach 1:

The patent performs magnetization before the final structuring step that creates small dimensions. By magnetizing the larger structures first, the laser beam can effectively penetrate and magnetize the entire structure without deflection issues. After magnetization, the structures are then processed into smaller dimensions, preserving the strong magnetization that was established when the structures were larger.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of magnetoresistive apparatuses with high magnetization and independent magnetizations in various regions, leading to improved signal levels and effective operation in sensors like angle and speed sensors.

Implementation Method 1

a region to be magnetized is then heated by means of a laser beam

Methodology Applied
Scientific EffectLaser heating: Laser

Implementation Method 2

Magnetoresistive apparatuses use magnetoresistive effects, in which a resistance changes depending on a magnetic field

Methodology Applied
Scientific EffectMagnetoresistive effect: Magnetoresistance

Data Source

PatentUS11335851B2Methods and apparatuses for producing magnetoresistive apparatuses
Publication Date: 2022.05.17 INFINEON TECHNOLOGIES AG
  • US11335851B2 patent drawing
  • US11335851B2 patent drawing
  • US11335851B2 patent drawing

AI summary

Methods and apparatuses for producing magnetoresistive apparatuses are provided. Here, structures are formed for defining regions of the same magnetization, magnets are magnetized, and structures are formed within the magnets of the regions, for example, in order to define magnetoresistive elements.