Integrated Magnetoresistive Sensor with Ferromagnetic Concentrator Arm
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Solution Overview
Problem
Current magnetoresistive sensors face challenges in detecting magnetic fields perpendicular to the chip due to manufacturing complexities and cost issues, leading to sensitivity variations and increased device volume, making them unsuitable for small apparatuses and precise navigation systems.
Innovation Solution
A magnetoresistive sensor integrated in a chip with a substrate and insulating region, featuring a magnetoresistor and a ferromagnetic concentrator arm extending transversely to the sensitivity plane, ensuring direct contact and minimizing misalignments for enhanced magnetic field detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If magnetoresistive sensors are integrated in a chip for detecting magnetic fields perpendicular to the chip, then sensitivity and compactness are improved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent merges the magnetoresistor and ferromagnetic concentrator into a single integrated chip structure. The concentrator is formed as an extension of the magnetoresistor structure itself, eliminating the need for separate assembly operations and reducing manufacturing complexity while maintaining high sensitivity for perpendicular magnetic field detection.
Solution Approach 2:
The patent transitions from planar magnetoresistive sensors to a three-dimensional structure by extending the ferromagnetic concentrator vertically from the chip surface. This dimensional change enables detection of magnetic fields perpendicular to the chip while maintaining compact integration.
2Volume of moving object
If magnetoresistive sensors are integrated in a chip for detecting magnetic fields perpendicular to the chip, then device volume is reduced, but manufacturing precision requirements increase
Solution Approach 1:
The magnetoresistor and concentrator are formed as a unified structure in the same fabrication step, eliminating alignment requirements between separate components. This merging approach reduces manufacturing precision requirements while achieving compact device volume.
Solution Approach 2:
The ferromagnetic concentrator is pre-formed as part of the magnetoresistor structure during the same fabrication process, ensuring perfect alignment before final assembly. This preliminary formation eliminates subsequent alignment operations and reduces precision requirements.
3Ease of manufacture
If conventional magnetoresistive sensors are used, then manufacturing cost is reduced, but sensitivity to perpendicular magnetic fields deteriorates
Solution Approach 1:
The patent introduces a vertical dimension by extending the ferromagnetic concentrator perpendicular to the chip surface, enabling detection of perpendicular magnetic fields. This dimensional change maintains compatibility with conventional planar fabrication processes, keeping manufacturing costs reasonable while significantly improving sensitivity.
Solution Approach 2:
The sensor utilizes composite ferromagnetic materials with specific magnetic properties optimized for perpendicular field detection. The combination of magnetoresistive material and ferromagnetic concentrator material creates a composite structure that enhances sensitivity while remaining manufacturable with existing processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides improved sensitivity, reduced misalignment issues, and a compact design, enabling efficient detection of magnetic fields perpendicular to the chip with lower manufacturing costs and increased repeatability.
Implementation Method 1
a first concentrator of a second ferromagnetic material formed in the chip, the first concentrator including an arm extending in a transverse direction to the sensitivity plane and having an end in contact with the first magnetoresistor
Implementation Method 2
magnetoresistive sensors exploit the capacity of appropriate ferromagnetic materials (referred to as 'magnetoresistive materials') to modify their own resistance in presence of an external magnetic field
Data Source
AI summary
An integrated magnetoresistive sensor, formed in a chip including a substrate having a surface and an insulating region covering the surface of the substrate. A magnetoresistor, of a first ferromagnetic material, is formed in the insulating region and has a sensitivity plane parallel to the surface. A concentrator of a second ferromagnetic material is formed in the substrate and has at least one arm extending in a transverse direction to the sensitivity plane. The arm has one end in contact with the magnetoresistor.