Magnetoresistive Sensor Integrated Electrode Pad Recessed Contact Hole
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Solution Overview
Problem
Existing magnetic sensors face instability in the connection between electrode pads and element sections due to the need for precise alignment and additional production steps, leading to increased costs and complexity in the production process.
Innovation Solution
The magnetic sensor design integrates element sections and extension regions with an identical multilayer configuration, featuring a recessed contact hole for electrode pad formation, which eliminates the need for independent electrode layer formation, stabilizing the connection and simplifying the production process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electrode layers are formed in an independent step extending from element sections, then electrical connection can be established, but alignment accuracy requirements increase and connection stability deteriorates
Solution Approach 1:
The electrode layer and element section are merged into a single integrated structure formed by one patterning step. The electrode layer extends continuously from the element section without requiring separate alignment, eliminating the technical contradiction between connection stability and alignment accuracy requirements.
2Reliability
If electrode layers are formed in an independent step, then electrical connection is achieved, but the number of production steps increases
Solution Approach 1:
The formation of the electrode layer is merged with the element section patterning step. Both structures are created simultaneously in a single photolithography and etching process, reducing the total number of production steps while maintaining reliable electrical connection.
Solution Approach 2:
The same patterning process serves dual purposes: defining the element section geometry and forming the electrode layer extension. This multi-functional approach eliminates the need for a separate electrode formation step.
3Reliability
If electrode layers are formed with sufficient thickness, then good electrical connection is achieved, but additional material requirements increase production costs
Solution Approach 1:
The electrode layer material is deposited as part of the element section multilayer stack. The same CoFeB and Ta layers that form the magnetoresistive element also constitute the electrode layer, eliminating the need for additional expensive conductive materials like Au or Cu.
Solution Approach 2:
The electrode layer uses the same material composition as the element section (CoFeB and Ta layers), creating a homogeneous structure throughout. This eliminates material transitions and interface issues while reducing material costs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design stabilizes the connection between electrode pads and element sections, reduces production costs, and simplifies the manufacturing process by integrating the element and extension regions, enhancing the reliability and efficiency of the magnetic sensor production.
Implementation Method 1
a magnetoresistive element whose electrical resistance changes in response to the intensity of external magnetic fields
Data Source
AI summary
A magnetoresistive element includes, in plan view, an element section and an extension region extending from an end portion of the element section; and an insulation layer is formed on the element section and the extension region. A contact hole having a recessed shape, penetrating through the insulation layer, and extending at least to the extension region is formed; an electrode pad is formed in the contact hole; a surface of the electrode pad is exposed to outside; and the electrode pad is electrically connected to the extension region. The element section and the extension region are integrally formed so as to have an identical layer configuration employing a magnetoresistive effect in which electrical resistance varies in response to external magnetic fields.