Low-noise Magnetoresistive Sensor with Multi-layer Magnetic Modulation

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Solution Overview

Problem

Magnetoresistive sensors face high 1/f noise at low frequencies, which hinders accurate magnetic signal measurement, and existing solutions using MEMS technology with vibrating ferromagnetic flux concentrators increase complexity and size.

Innovation Solution

A low-noise magnetoresistive sensor with a multi-layer magnetic modulation structure, comprising a substrate with a multi-layer magnetic modulation structure array, a magnetoresistive sensing unit, and a two-port excitation coil, where the magnetoresistive sensing unit is positioned between the modulation structures, and an excitation current is applied to reduce 1/f noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a vibrating soft ferromagnetic flux concentrator structure is added to reduce 1/f noise, then measurement precision is improved, but device complexity and size increase

Engineering Contradiction:
Improvemagnetic signal measurement accuracyVSAvoidsensor structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical vibrating flux concentrator structure with a magnetic modulation structure that uses magnetic field interaction instead of mechanical vibration. The modulation structure comprises alternating soft ferromagnetic layers and non-magnetic layers that create magnetic flux modulation without requiring mechanical movement, thereby eliminating the complexity of vibration drivers while maintaining noise reduction capability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs a composite magnetic modulation structure consisting of multiple layers with different magnetic properties (soft ferromagnetic layers alternating with non-magnetic or hard ferromagnetic layers). This composite structure creates effective magnetic flux modulation through the interaction between layers, achieving noise reduction without mechanical components

Inventive Principle:
Principle #40Composite materials

2Measurement precision

If a vibrating soft ferromagnetic flux concentrator structure is added to reduce 1/f noise, then measurement precision is improved, but the sensor size increases

Engineering Contradiction:
Improvemagnetic signal measurement accuracyVSAvoidsensor size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The magnetic modulation structure replaces the mechanical vibrating system with a static multi-layer magnetic structure that achieves modulation through magnetic field interaction. This substitution eliminates the need for large mechanical components and vibration drivers, significantly reducing the overall sensor size while maintaining noise reduction performance

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The modulation structure is designed as a compact multi-layer stack where soft ferromagnetic layers and non-magnetic layers are nested alternately. This nested configuration achieves effective magnetic flux modulation within a minimal volume, avoiding the space requirements of mechanical vibration structures

Inventive Principle:
Principle #7Nested doll (Nesting)

3Measurement precision

If frequency modulation is used to move measurement from low-frequency to high-frequency region, then 1/f noise energy density is reduced, but additional modulation structure is required

Engineering Contradiction:
Improvenoise energy densityVSAvoidmodulation structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent uses a composite multi-layer magnetic structure where alternating soft ferromagnetic and non-magnetic layers create magnetic flux modulation. The differential magnetic properties of adjacent layers produce the frequency modulation effect needed to shift measurements away from the 1/f noise region, achieving noise reduction without complex additional components

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The modulation function is merged into the sensor structure itself through the multi-layer magnetic modulation structure. The alternating layers inherently provide the frequency modulation capability, combining the modulation function with the sensing structure rather than requiring separate modulation components

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces the energy density of 1/f noise, improving magnetic signal measurement accuracy with a compact, simple, and sensitive sensor design.

Implementation Method 1

a magnetic signal is selectively pre-modulated into a high-frequency magnetic field, then it is measured by the magnetoresistive sensor to output a high-frequency voltage signal

Methodology Applied
Scientific EffectMagnetic field modulation: Magnetic Field

Implementation Method 2

There is 1/f noise in a magnetoresistive sensor during normal use. Reducing the noise of the magnetoresistive sensor and developing a low-noise magnetoresistive sensor are of a great significance for improving accurate measurement of magnetic signals

Methodology Applied
Scientific Effect1/f noise:

Implementation Method 3

the magnetoresistive sensor has high 1/f noise at a low frequency, and mainly has thermal noise at a high frequency

Methodology Applied
Scientific EffectMagnetoresistive effect: Magnetoresistance

Data Source

PatentUS11067647B2Low-noise magnetoresistive sensor having multi-layer magnetic modulation structure
Publication Date: 2021.07.20 MULTIDIMENSION TECH CO LTD
  • US11067647B2 patent drawing
  • US11067647B2 patent drawing
  • US11067647B2 patent drawing

AI summary

A low-noise magnetoresistive sensor includes a substrate and an array of magnetic modulation structures on the substrate. The structure includes upper and lower soft ferromagnetic layers and a conductive metal layer in the middle. The two ends of the structure are connected to form a two-port excitation coil. Adjacent structures have opposite current directions. A magnetoresistive sensing unit is located above or below and is centered in the gap between the structures. The sensitive direction of the sensing units is perpendicular to a long direction of the structures. An array of sensing units is electrically connected to form a magnetoresistive sensor, and the sensor is connected to the sensor bond pads. When measuring an external magnetic field, an excitation current is applied to the excitation coil, and the output of the voltage or current signal of the magnetoresistive sensor is demodulated to produce a low-noise voltage signal.