Magnetoresistive Sensor Stress Layer for Reference Magnetization Alignment

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Solution Overview

Problem

Magnetoresistive sensors, particularly TMR sensors, experience increased sensing errors and reduced sensitivity due to mechanical stress during fabrication or integration, leading to a weaker reference layer system and faster degradation.

Innovation Solution

A stress inducing layer is coupled to the layer stack of the magnetoresistive sensor to apply mechanical stress along a specific axis, aligning the magnetization axis of the reference layer system in a desired direction, thereby stabilizing the reference layer system and enhancing the TMR effect and sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If mechanical stress is applied during fabrication or integration, then the sensor can be manufactured and integrated, but the reference layer system becomes weaker and more unstable, leading to increased sensing errors and reduced sensitivity

Engineering Contradiction:
Improvefabrication and integrationVSAvoidreference layer system stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

A stress inducing layer is added to the sensor structure that applies a counteracting mechanical stress to compensate for the stress generated during fabrication and integration. This preliminary anti-action prevents the reference layer system from becoming unstable, maintaining magnetization alignment and sensor performance throughout the manufacturing and integration process.

Inventive Principle:
Principle #9Preliminary anti-action

2Device complexity

If the magnetization axis of the reference layer system is not properly aligned, then the sensor structure can be simpler, but sensing errors increase and sensitivity decreases

Engineering Contradiction:
Improvesensor structureVSAvoidsensing accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The stress inducing layer changes the mechanical stress parameter in the sensor structure to achieve proper alignment of the magnetization axis in the reference layer system. By controlling the stress state, the patent ensures that the magnetization axis aligns with the desired sensing direction, improving measurement precision without significantly increasing device complexity.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If the reference layer system is unstable, then the sensor can be manufactured faster, but the TMR effect is reduced and sensitivity decreases

Engineering Contradiction:
Improvemanufacturing speedVSAvoidTMR effect and sensitivity
Core Design Contradiction:
ProductivityVSPower

Solution Approach 1:

The stress inducing layer is incorporated into the sensor structure during manufacturing to preliminarily establish stable magnetization alignment in the reference layer system. This preliminary action ensures that the TMR effect is maximized and sensitivity is enhanced from the outset, allowing for faster manufacturing without compromising performance.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent uses a composite structure combining the reference layer system with a stress inducing layer made of appropriate material. This composite structure provides both mechanical stability and magnetic properties needed to maintain strong TMR effect and high sensitivity throughout the sensor's operational life.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases the TMR effect by up to 20%, reduces sensing errors, and extends the lifetime of the sensing element by maintaining a more stable reference layer system, resulting in higher signal amplitudes and improved angular sensor performance.

Implementation Method 1

the stress inducing layer is configured to apply a force to the layer stack to induce a mechanical stress in the layer stack along a mechanical stress axis such that the magnetization axis is aligned parallel with the mechanical stress axis or perpendicular with the mechanical stress axis

Methodology Applied
Scientific EffectMagnetostriction: Magnetostriction

Implementation Method 2

a GMR effect is a quantum mechanical magnetoresistance effect that is observed in thin-film structures comprising of alternating ferromagnetic and non-magnetic conductive layers

Methodology Applied
Scientific EffectGiant magnetoresistance (GMR): Magnetoresistance

Implementation Method 3

A TMR effect occurs in a magnetic tunnel junction (MTJ), wherein the magnetic tunnel junction occurs at a thin insulator that separates two ferromagnets from one another

Methodology Applied
Scientific EffectTunnel magnetoresistance (TMR): Magnetoresistance

Implementation Method 4

An AMR effect is a property of a material in which a dependence of the electrical resistance on an angle between a direction of an electric current (e.g., a sensing axis) and a magnetization direction is observed

Methodology Applied
Scientific EffectAnisotropic magnetoresistance (AMR): Magnetoresistance

Data Source

PatentUS12399236B2Inducing mechanical stress in magnetoresistive sensing element to align magnetization axis of reference layer system in preferred direction for improved sensor performance
Publication Date: 2025.08.26 INFINEON TECHNOLOGIES AG
  • US12399236B2 patent drawing
  • US12399236B2 patent drawing
  • US12399236B2 patent drawing

AI summary

A magnetoresistive sensor includes a sensing element and a stress inducing layer. The sensing element has a layer stack that includes a reference layer having a fixed reference magnetization aligned with a magnetization axis; a magnetic free layer having a magnetically free magnetization, wherein the magnetically free magnetization is variable in a presence of an external magnetic field; and a non-magnetic layer arranged between the reference layer and the magnetic free layer. The stress inducing layer is coupled to the layer stack and is configured to apply a force to the layer stack to induce a mechanical stress in the layer stack along a mechanical stress axis such that the magnetization axis is aligned parallel with the mechanical stress axis or perpendicular with the mechanical stress axis.