Magnetoresistive Element with W Buffer Layer

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional magnetoresistive elements with perpendicular magnetic anisotropy face challenges in maintaining high magnetic anisotropy energy as the film thickness of the CoFeB layer increases, leading to reduced retention properties and increased series resistance due to the high resistance of the MgO layer acting as parasitic resistance.

Innovation Solution

The use of a W or Ti buffer layer with an oxygen-deficient MgO layer as the underlying layer, which reduces series resistance and allows for sufficient perpendicular magnetic anisotropy generation, even at increased film thicknesses, by leveraging interface magnetic anisotropy from both sides of the storage layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the film thickness of the CoFeB layer is increased, then the perpendicular magnetic anisotropy energy is improved, but the series resistance increases due to the high resistance of the MgO layer

Engineering Contradiction:
Improveperpendicular magnetic anisotropy energyVSAvoidseries resistance
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

A W or Ti buffer layer is introduced as an intermediary between the MgO underlying layer and the CoFeB storage layer. This buffer layer serves as a mediator that reduces the series resistance of the MgO layer while preserving the perpendicular magnetic anisotropy energy, thereby resolving the contradiction between improving magnetic anisotropy and reducing resistance.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the physical and chemical parameters of the MgO layer by creating an oxygen-deficient state through controlled oxidation of the W or Ti buffer layer. This parameter change (oxygen concentration) reduces the resistance of the MgO layer, allowing for increased CoFeB film thickness without proportionally increasing series resistance.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the film thickness of the CoFeB layer is increased, then the magnetoresistance ratio is improved, but the retention properties deteriorate

Engineering Contradiction:
Improvemagnetoresistance ratioVSAvoidretention properties
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The W or Ti buffer layer acts as an intermediary that enables the CoFeB layer to achieve greater thickness while maintaining perpendicular magnetic anisotropy. This mediator allows the system to simultaneously improve magnetoresistance ratio (through increased thickness) and maintain retention properties (through preserved magnetic anisotropy).

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach maintains high perpendicular magnetic anisotropy energy and improves retention properties by reducing the series resistance and increasing the film thickness of the storage layer, enhancing the magnetoresistance ratio and overall performance of the magnetoresistive element.

Implementation Method 1

by leveraging interface magnetic anisotropy from both sides of the storage layer

Methodology Applied
Scientific EffectInterface magnetic anisotropy: Anisotropy

Implementation Method 2

magnetoresistive elements including a ferromagnetic tunneling junction have been gaining attention since such magnetoresistive elements were discovered to exhibit a high magnetoresistance rate

Methodology Applied
Scientific EffectMagnetoresistance: Magnetoresistance

Implementation Method 3

A perpendicular magnetization film, which includes an axis of easy magnetization in a direction perpendicular to a film plane, has been considered to be used as a ferromagnetic material forming the magnetoresistive element

Methodology Applied
Scientific EffectSpin-momentum transfer: Angular Momentum

Data Source

PatentUS9178137B2Magnetoresistive element and magnetic memory
Publication Date: 2015.11.03 KIOXIA CORP
  • US9178137B2 patent drawing
  • US9178137B2 patent drawing
  • US9178137B2 patent drawing

AI summary

A magnetoresistive element includes first and magnetic layers, first and second non-magnetic layers and a W layer. Each of the first and second magnetic layers includes an axis of easy magnetization in a direction perpendicular to a film plane. The first magnetic layer has a variable magnetization direction. The second magnetic layer has an invariable magnetization direction. The first non-magnetic layer is provided between the first and second magnetic layers. The second non-magnetic layer is arranged on a surface of the first magnetic layer opposite to a surface on which the first non-magnetic layer is arranged and contains MgO. The W layer is arranged on a surface of the second non-magnetic layer opposite to a surface on which the first magnetic layer is arranged, and is in contact with the surface of the second non-magnetic layer.