Magnetostrictive Holding Struts for Optical Component Positioning
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current projection exposure apparatuses for microlithography require precise positioning of optical components, which is challenging due to limitations in achieving desired accuracies and mechanical stiffness.
Innovation Solution
A device utilizing magnetostrictive material holding struts with a mechanism to generate a magnetic field, allowing for precise adjustable positioning of optical components by varying their length, enabling high mechanical stiffness and flexible displacement options.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional positioning mechanisms are used, then the positioning accuracy can be achieved, but the mechanical stiffness is insufficient
Solution Approach 1:
The patent replaces conventional mechanical positioning actuators with magnetostrictive actuators that use magnetic fields to induce controlled elongation in holding struts. This substitution eliminates mechanical contact and friction while achieving both high positioning accuracy (picometer to micrometer range) and high mechanical stiffness (at least 10^4 N/mm) through the magnetostrictive effect in solid materials.
Solution Approach 2:
The patent changes the physical state or properties of the holding struts by applying magnetic fields that induce magnetostriction. By varying the magnetic field strength and direction, the patent achieves precise control over the elongation of the holding struts, enabling adjustable positioning with high accuracy while maintaining structural stiffness through the solid material properties.
2Strength
If high mechanical stiffness is achieved, then the structural stability is improved, but the positioning flexibility is reduced
Solution Approach 1:
The patent makes the holding unit dynamically adjustable by using magnetostrictive actuators that can change the length of holding struts in real-time through magnetic field control. This allows the system to adapt its positioning configuration dynamically while maintaining high mechanical stiffness, as the magnetostrictive effect enables continuous adjustment without mechanical wear or loss of structural integrity.
Solution Approach 2:
By replacing rigid mechanical adjustment mechanisms with magnetic field-controlled magnetostrictive actuators, the patent achieves both high stiffness and positioning flexibility. The magnetic field provides contactless control that can rapidly adjust positions while the solid magnetostrictive material maintains structural rigidity during operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise displacement of optical components with a change in length ranging from picometers to micrometers, achieving high mechanical stiffness and flexible positioning, particularly suitable for EUV projection exposure apparatuses.
Implementation Method 1
The holding struts have an extension in a longitudinal direction which can be varied by a specific absolute value by the effect of the magnetic field
Implementation Method 2
a mechanism for generating a magnetic field has a predetermined direction and amplitude distribution in the region of the holding unit
Data Source
AI summary
A device for adjustably positioning an optical component includes a holding unit, which is which at least partly composed of a magnetostrictive material, and a mechanism for generating a magnetic field having a predetermined directional and amplitude distribution in the region of the holding unit. The holding unit has, in a predefined direction, an expansion which can be varied by a specific absolute value by the effect of the magnetic field.