Magnetron Cathode Magnetic Field Generator for Sputtering Target Utilization
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Solution Overview
Problem
Conventional magnetron sputtering systems have a low target utilization rate, typically around 15 to 20%, which is uneconomical when using expensive target materials, as the erosion pattern on the target surface does not efficiently utilize the material.
Innovation Solution
A magnetic field generator configuration featuring a ring-shaped first magnetic body and a second magnetic body with their pole axes parallel to the target surface, supported by a magnetic permeable base, and a magnetic field distribution change member between them, enhances the magnetic field distribution and increases the erosion region width, thereby improving target utilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If magnets are fixed with respect to the target in a conventional magnetic field generator, then the magnetic field distribution is stable, but the target utilization rate is extremely low (15 to 20%)
Solution Approach 1:
The patent introduces a movable magnetic field generator that can change its position relative to the target. The magnetic field generator includes a yoke and magnets that can be moved along the target surface, allowing dynamic adjustment of the erosion region position. This enables continuous utilization of different areas of the target, improving target utilization rate from 15-20% to potentially much higher values, while maintaining stable magnetic field distribution during each positioning phase
Solution Approach 2:
The patent adds a temporal dimension to the magnetic field application by moving the magnetic field generator along the target surface over time. Instead of a fixed spatial arrangement, the system transitions to a dynamic spatio-temporal configuration where the magnetic field position changes continuously, enabling comprehensive utilization of the target surface area
2Device complexity
If the erosion region is fixed on the target, then the magnetic field configuration is simple, but the target material is not efficiently utilized
Solution Approach 1:
The magnetic field generator is designed with movable components including the yoke and magnets that can be repositioned along the target surface. This dynamic capability allows the erosion region to be moved systematically across different areas of the target, ensuring comprehensive utilization of the target material and minimizing waste, while the overall configuration remains relatively simple
Solution Approach 2:
The system recovers unused portions of the target material by moving the erosion region to new areas. Instead of discarding the target after localized erosion, the movable magnetic field generator continuously accesses fresh portions of the target surface, effectively recovering and utilizing material that would otherwise remain unused
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases the target utilization rate by widening the erosion region on the target surface, enhancing the magnetic field magnitude and improving the thickness utilization, resulting in a higher overall target utilization rate of up to 40% or more.
Implementation Method 1
a magnetic field generator (10) arranged behind a target (8) and for generating a magnetic field on a front surface (8a) of the target (8) based on magnetic force lines (11)
Implementation Method 2
confining plasma near the target surface by utilizing a drift motion of electrons
Implementation Method 3
a magnetic permeable base (12) supporting the first magnetic body (144) and the second magnetic body (142) from behind
Data Source
AI summary
A magnetic field generator arranged behind a target and for generating a magnetic field on a front surface of the target based on magnetic force lines can include a ring-shaped outer magnetic body having a pole axis in a parallel direction (X-direction) with respect to the target surface, a center magnetic body arranged on an inner side of the outer magnetic body and having a pole axis in a parallel direction (X-direction) with the direction of the pole axis of the outer magnetic body, a yoke plate for supporting the outer magnetic body and the center magnetic body from behind, and a magnetic permeable plate for changing a magnetic field distribution of the front surface of the target. The magnetic permeable plate is arranged so as to be supported by the yoke plate from behind.