Maintenance Display Control for Prioritizing Abnormal Apparatuses

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Solution Overview

Problem

Existing maintenance assistance systems face challenges in simultaneously identifying and prioritizing multiple apparatuses with abnormalities for maintenance in semiconductor device manufacturing, leading to inefficiencies in productivity recovery.

Innovation Solution

An information processing apparatus with an acquisition unit and a display control unit that acquires and displays information on the operational and operating states of multiple apparatuses, allowing for the identification and prioritization of apparatuses requiring maintenance based on their states and maintenance needs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If multiple apparatuses with abnormalities are maintained in order, then maintenance can be performed systematically, but it becomes difficult to identify which apparatus should be maintained preferentially

Engineering Contradiction:
Improvemaintenance prioritizationVSAvoidapparatus state information
Core Design Contradiction:
Ease of operationVSLoss of information

Solution Approach 1:

The system segments the maintenance task by dividing multiple apparatuses into individual manageable units, each with its own abnormality information displayed separately. This allows maintenance personnel to assess each apparatus independently and prioritize them systematically rather than facing a undifferentiated group of problematic equipment.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system uses color-coded display elements to visually represent the state and priority of each apparatus. Different colors indicate different levels of abnormality or priority, enabling rapid visual assessment and immediate identification of which apparatus requires preferential maintenance attention without requiring detailed analysis of each unit.

Inventive Principle:
Principle #32Color changes

2Measurement precision

If all apparatuses are monitored in detail, then accurate maintenance decisions can be made, but the complexity of the monitoring system increases

Engineering Contradiction:
Improveapparatus state monitoringVSAvoidmonitoring system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system extracts only the essential abnormality information from each apparatus and displays it in a simplified format. Rather than monitoring and displaying all possible parameters, it focuses on extracting and presenting the key state information needed for maintenance prioritization, reducing monitoring complexity while maintaining decision-making accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The monitoring system is designed to handle multiple apparatuses simultaneously using a unified interface and display format. This universal approach allows the same system architecture to monitor any number of apparatuses without requiring separate complex monitoring systems for each unit, reducing overall system complexity while maintaining comprehensive monitoring capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS12007752B2Information processing apparatus, display control method, storage medium, substrate processing system, and method for manufacturing article
Publication Date: 2024.06.11 CANON KK
  • US12007752B2 patent drawing
  • US12007752B2 patent drawing
  • US12007752B2 patent drawing

AI summary

An information processing apparatus for controlling display on a user interface includes an acquisition unit, and a display control unit. The acquisition unit acquires information including an operated state indicating a state regarding an operation performed on each of a plurality of apparatuses, and an operating state indicating a state regarding an operating status of each of the plurality of apparatuses. The display control unit controls display of the information regarding an apparatus identified from among the plurality of apparatuses on the user interface, based on the information including the operated state and the operating state acquired by the acquisition unit.