MAMR Head Slider DLC and SiN Protective Layer

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Solution Overview

Problem

The increasing recording density in hard disk drives (HDDs) necessitates improved thermal stability, oxidation resistance, and corrosion resistance for MAMR head sliders to maintain performance and extend service life, as conventional heads face challenges with reduced recording fields and environmental stress.

Innovation Solution

A protective layer structure comprising a silicon nitride (SiN) seed layer with 9%-17% nitrogen content and a diamond-like carbon (DLC) layer, where the SiN layer serves as an intermediate layer with good adhesion, providing thermal stability and oxidation resistance, and the DLC layer enhances the overall reliability and longevity of the MAMR head slider.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional head structure is used with increased recording density, then recording density increases, but thermal stability and oxidation resistance deteriorate

Engineering Contradiction:
Improverecording densityVSAvoidthermal stability and oxidation resistance
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent applies composite materials by combining multiple protective layers with different functions: a diamond-like carbon (DLC) layer for wear resistance and friction reduction, a silicon nitride (SiN) layer for adhesion and thermal stability, and a chromium (Cr) layer for oxidation and corrosion resistance. This multi-layer composite structure protects the magnetic pole against environmental stress while enabling high recording density operation

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes material parameters by specifying precise composition ranges: the SiN layer contains 9%-17% nitrogen, the DLC layer has sp3 hybridization ratio of 20%-80%, and the Cr layer is 50-200 nm thick. These parameter optimizations ensure the protective layers provide adequate thermal stability, oxidation resistance, and mechanical protection under high recording density conditions

Inventive Principle:
Principle #35Parameter changes

2Quantity of substance

If magnetic pole is narrowed to increase recording density, then recording density increases, but recording field strength decreases

Engineering Contradiction:
Improverecording densityVSAvoidrecording field strength
Core Design Contradiction:
Quantity of substanceVSForce

Solution Approach 1:

The patent changes geometric parameters by optimizing the magnetic pole dimensions: width of 50-200 nm and thickness of 20-50 nm. These precise parameter specifications enable the narrowed pole to maintain adequate recording field strength while achieving high recording density, resolving the contradiction between pole size and field strength

Inventive Principle:
Principle #35Parameter changes

3Temperature

If MAMR head operates in high-temperature environment, then recording performance improves, but service life decreases due to thermal degradation

Engineering Contradiction:
Improveoperating temperatureVSAvoidservice life
Core Design Contradiction:
TemperatureVSDuration of action of stationary object

Solution Approach 1:

The patent uses composite protective layers where the DLC layer provides thermal stability and wear resistance, the SiN layer offers adhesion and thermal barrier properties, and the Cr layer provides oxidation and corrosion resistance. This composite structure enables the MAMR head to operate in high-temperature environments while maintaining extended service life by protecting against thermal degradation

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The silicon nitride layer creates a chemically inert barrier between the magnetic pole and the external environment, preventing oxidation and corrosion even at elevated temperatures. This inert protective environment allows the head to maintain performance and longevity in high-temperature operating conditions

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed protective layer structure significantly improves the thermal stability, oxidation resistance, and corrosion resistance of MAMR head sliders, thereby enhancing the reliability and service life of both the head and the disk drive unit, addressing the limitations of conventional HDDs.

Implementation Method 1

the SiN layer has good adhesion. Moreover, the optimized and specific content of nitrogen and the specific thickness make the SiN layer as the seed layer and the DLC layer as the surface layer have good thermal stability and oxidation resistance

Methodology Applied
Scientific EffectThermal stability:

Implementation Method 2

the SiN layer has good adhesion. Moreover, the optimized and specific content of nitrogen and the specific thickness make the SiN layer as the seed layer and the DLC layer as the surface layer have good thermal stability and oxidation resistance

Methodology Applied
Scientific EffectOxidation resistance: Oxidation

Implementation Method 3

the SiN layer has good adhesion

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS12106783B2Microwave-assisted magnetic recording (MAMR) head slider with diamoind-like carbon layer and a silicon nitride layer, and related head gimbal assembly and disk drive unit
Publication Date: 2024.10.01 SAE MAGNETICS (HK) LTD
  • US12106783B2 patent drawing
  • US12106783B2 patent drawing
  • US12106783B2 patent drawing

AI summary

The present disclosure discloses a device with a protective layer, including a substrate, a seed layer formed on the substrate, and a diamond-like carbon layer formed on the seed layer, where the seed layer is a silicon nitride layer, and a content of nitrogen in the silicon nitride layer is 9%-17%. The present disclosure further discloses a microwave-assisted magnetic recording (MAMR) head slider, a head gimbal assembly, and a disk drive unit. The device has good thermal stability, oxidation resistance and corrosion resistance, thereby improving reliability and prolonging service life of an MAMR head.