Mandrel Alignment of Lithography Modules With Low-Particle Preloading
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Solution Overview
Problem
Projection exposure apparatuses for semiconductor lithography face increasing demands for precise alignment of optical components due to higher positioning accuracy requirements and modular designs, which current methods and devices struggle to meet, especially in plug-and-play scenarios and vacuum environments.
Innovation Solution
A method and device utilizing a mandrel with radial expansion to align optical components by pre-loading and bracing them with controlled torque and contact force, minimizing particle generation and allowing for accurate positioning with reduced parasitic deformations, suitable for use in vacuum environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manipulators are used for positioning optical elements, then positioning accuracy can be improved, but the required travel path increases which reduces the resolution required for positioning accuracy
Solution Approach 1:
The patent applies preliminary action by performing pre-alignment of optical elements during assembly with high precision before the operational phase. This preliminary positioning reduces the subsequent travel path required by manipulators, as the elements are already close to their final positions. The pre-alignment process establishes a foundation that minimizes the range of motion needed during operation.
Solution Approach 2:
The positioning process is segmented into two distinct phases: pre-alignment during assembly and fine positioning during operation. This segmentation allows each phase to be optimized independently - pre-alignment achieves coarse positioning with high accuracy, while manipulators handle fine adjustments over shorter distances, thereby reducing the overall travel path requirement.
2Adaptability or versatility
If modular design is implemented for easy replacement, then adaptability is improved, but alignment accuracy during exchange deteriorates due to limited measurement means
Solution Approach 1:
The alignment system incorporates self-service features through integrated alignment marks and reference structures that are built into the modular components themselves. These self-contained alignment features enable accurate positioning during replacement without requiring external measurement equipment, thus maintaining alignment accuracy while preserving modular replaceability.
Solution Approach 2:
Reference structures and alignment marks serve as intermediaries between the modular components and the alignment process. These intermediary elements facilitate precise positioning by providing fixed reference points that guide the alignment during module exchange, eliminating the need for complex external measurement systems.
3Ease of operation
If plug-and-play process is implemented for component replacement, then ease of operation is improved, but alignment accuracy deteriorates due to lack of pairing procedures
Solution Approach 1:
The plug-and-play system incorporates self-aligning features through precisely machined mechanical interfaces and integrated alignment marks. These self-service mechanisms automatically guide components into correct positions during insertion, eliminating the need for manual pairing procedures while maintaining high alignment accuracy. The system serves itself through built-in geometric constraints and reference features.
Solution Approach 2:
The mechanical interfaces utilize asymmetric design with unique keying features and non-interchangeable connection geometries. This asymmetry ensures that components can only be installed in the correct orientation and position, providing automatic alignment guidance while preventing incorrect assembly. The asymmetric features guide the components into precise alignment during the simple plug-and-play insertion process.
4Reliability
If contact force is increased for secure mounting, then reliability is improved, but particle generation increases which affects imaging accuracy
Solution Approach 1:
Alignment marks and reference structures serve as intermediary elements that enable secure mounting through precise geometric engagement without requiring high contact forces. These intermediary features provide mechanical interlocking and positional stability through their design, allowing reliable mounting while minimizing friction and particle generation at the contact interfaces.
Solution Approach 2:
The system utilizes thin-film coatings and flexible mounting interfaces that reduce friction and contact stress. These thin film elements allow for secure mounting with lower contact forces by distributing the load over larger areas and reducing point-contact friction, thereby minimizing particle generation while maintaining mounting reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves precise alignment of optical components with reduced particle generation and parasitic deformations, enhancing imaging accuracy and enabling reliable alignment in high-precision semiconductor lithography applications.
Implementation Method 1
preloading the mandrel perpendicular to the z-direction to a predetermined torque in order to pre-position the two components in relation to one another in the x-y plane
Implementation Method 2
bracing the mandrel with the recess with maximum torque
Implementation Method 3
positioning the two components in the z-direction until they are in contact with a contact force FA
Implementation Method 4
positioning the two components in the z-direction until one component rests on the second component with maximum weight force Fmax
Data Source
AI summary
Disclosed is a method for aligning two components (31, 33) of a projection exposure apparatus (1, 101) for semiconductor lithography, comprising:inserting at least one mandrel (30, 50) of a first component (33) into a recess (94) in a second component (31) in the z-direction,preloading the mandrel (30, 50) perpendicular to the z-direction to a predetermined torque for pre-positioning the two components (31,33) in relation to each other in the x-y plane,positioning the two components (31, 33) in the z-direction until they are in contact with a contact force FA,bracing the mandrel (30, 50) with the recess (94) with maximum torque,positioning the two components in the z-direction until the first component (31) rests on the second component (33) with maximum weight force Fmax.Also disclosed is device for aligning the two components (31, 33) comprises the mandrel.