Mandrel Pattern Generation via Segmentation and Bounding Box
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Solution Overview
Problem
The traditional methods for generating masks in advanced node integrated circuit production, such as 10 nm and 5 nm nodes, are time-consuming and often result in missing pattern features due to the complexity of irregular regions in layout designs.
Innovation Solution
A method for generating mandrel patterns involves constructing a bounding box around the pattern region, initiating leading mandrels from one edge, extending them across the box, and removing mandrels within inner borders, which reduces process time and ensures complete pattern formation without missing features.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional mask generating methods are used for advanced node production, then pattern features may be complete, but the process time is excessively long
Solution Approach 1:
The method segments the irregular pattern region into multiple convex sub-regions by identifying concave corners and generating dividing lines. Each convex sub-region is then processed independently to generate mandrels, which are finally merged to form the complete pattern. This segmentation approach maintains pattern completeness while reducing processing time by avoiding repeated operations on the entire irregular region.
2Reliability
If traditional mask generating methods are used for irregular regions, then all pattern features may be captured, but the complexity of the process increases
Solution Approach 1:
The complex irregular region is divided into simpler convex sub-regions that can be processed using standardized algorithms. The segmentation identifies concave corners and generates dividing lines to create manageable convex portions, reducing the overall process complexity while ensuring all pattern features are captured.
Solution Approach 2:
The method performs preliminary actions by pre-processing the irregular pattern region to identify concave corners, generate dividing lines, and create convex sub-regions before the actual mandrel generation. This preparation work simplifies the subsequent mandrel generation process by transforming a complex irregular region processing task into multiple simpler convex region processing tasks.
3Manufacturing precision
If traditional mask generating methods are used, then pattern accuracy may be maintained, but productivity decreases
Solution Approach 1:
By segmenting the irregular pattern region into convex sub-regions, the method enables parallel processing of multiple sub-regions, significantly improving productivity. Each convex sub-region is processed independently with standardized algorithms that maintain pattern accuracy, while the overall processing time is reduced through efficient segmentation and merging operations.
Data Source
AI summary
Embodiments of the present disclosure provide a method of generating mandrel patterns. A mandrel pattern is generated by constructing a boundary box, initiating a plurality of lead mandrels, and extending the lead mandrels across the boundary box. When a pattern region includes holes, portions of mandrels are removed from the holes after extension of the leading mandrels.