Manifold Body Leak Test Passages for Multi-Valve Sealing

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Solution Overview

Problem

Existing fluid control systems for semiconductor wafer manufacturing face challenges such as high construction costs, potential leak points, and difficulty in maintaining complex flow path shapes and orientations due to the use of welded valve assemblies and traditional manifold bodies.

Innovation Solution

A manifold body is designed with integrated valve body segments and conduit segments, featuring unified leak test ports and branching leak test passages that extend radially outward from the valve cavities, allowing for efficient leak detection using tracer gases and mass spectrometers, and optionally incorporating flexible diaphragms and bonnet nuts for sealing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple valve assemblies are connected by welding or other connections to form fluid control systems, then the systems can achieve desired flow path arrangements, but the construction time and cost increase, and potential leak points increase at the connections

Engineering Contradiction:

Improveflow path arrangement capabilityVSAvoidconstruction time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The patent integrates multiple valve bodies into a single monolithic structure with internal flow paths, eliminating the need to connect separate valve assemblies. This merging of previously separate components into one unified body reduces construction time by removing welding and connection steps while maintaining the desired flow path arrangements through internally machined channels.

Inventive Principle:

Principle #5Merging (Combining)

2Adaptability or versatility

If multiple valve assemblies are connected by welding or other connections, then the systems can achieve desired flow path arrangements, but the number of potential leak points increases at the many connections

Engineering Contradiction:

Improveflow path arrangement capabilityVSAvoidleak resistance

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

By combining multiple valve bodies into one monolithic structure, the patent eliminates external connections between valve assemblies that serve as potential leak points. The internal flow paths are machined as integral parts of the single body, ensuring continuous metal-to-metal sealing without gaskets or welds, thereby improving reliability and reducing leak risks.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If a manifold body block is machined to provide desired flow path arrangements, then multiple valve assemblies can be installed to control flow at multiple points, but the manufacturing complexity and cost increase

Engineering Contradiction:

Improvemulti-point flow control capabilityVSAvoidmanufacturing complexity

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

Inventive Principle:

Principle #5Merging (Combining)

4Adaptability or versatility

If the manifold body flow paths are extended and/or complex (non-straight), then desired flow control is achieved, but the polished surface finish requirements become difficult to maintain

Engineering Contradiction:

Improveflow control capabilityVSAvoidsurface finish quality

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentEP4077995B1Fluid component body with leak test passages

Publication Date: 2025.04.02 SWAGELOK CO

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Figure 1A
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AI summary

A manifold body includes at least first and second valve body segments each comprising an upper perimeter wall portion defining a valve cavity and a lower base portion defining one or more flow ports, a unified leak test port, a first branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the first valve body segment, radially outward of an outer seal surface in the valve cavity, and a second branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the second valve body segment, radially outward of an outer seal surface in the valve cavity.