Manifold Block Vaporizer System Eliminating External Conduits
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Solution Overview
Problem
Conventional vaporization systems for semiconductor manufacturing are hindered by the need for conduits between the vaporizer and supply rate controller, leading to increased size and complexity, as well as difficulties in replacement and integration with other gas panels.
Innovation Solution
A vaporization system design featuring a manifold block with internal flow paths for mounting both the vaporizer and supply rate controller, eliminating the need for conduits and allowing for simplified structure and easier replacement, with optional preheater, fluid detector, and flow rate control valve integration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conduits are used to connect the vaporizer and supply rate controller, then the system can function properly, but the system size increases and structure becomes complex
Solution Approach 1:
The patent merges the vaporizer and supply rate controller into a single integrated unit, eliminating the need for external conduits. The supply rate controller is positioned to directly communicate with the vaporizer chamber through integrated flow paths, reducing system volume while maintaining functionality.
Solution Approach 2:
The supply rate controller is nested within or directly adjacent to the vaporizer structure, with its flow paths embedded within the vaporizer housing. This nesting eliminates external conduits and reduces overall system size while preserving the control function.
2Volume of stationary object
If the supply rate controller is mounted on top of the vaporizer to reduce conduit length, then the system size is reduced, but the structure becomes more complex due to folded conduits
Solution Approach 1:
The patent extracts the conduit from the system entirely by integrating the flow path directly into the vaporizer structure. The supply rate controller connects to the vaporizer chamber through internal passages rather than external folded conduits, eliminating the complexity issue.
Solution Approach 2:
The vaporizer housing itself serves as an intermediary structure that contains both the vaporizer chamber and the supply rate controller flow paths. This intermediary structure provides direct communication between components without requiring external conduits.
3Adaptability or versatility
If the supply rate control valve is mounted on the side wall of the vaporization tank, then integration is achieved, but the flow path becomes complex and replacement tasks become awkward
Solution Approach 1:
The patent segments the vaporization system into modular components where the supply rate controller can be independently accessed and replaced. The integrated design allows the controller to be mounted on an accessible surface of the vaporizer housing, maintaining integration while enabling easy maintenance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces system size, simplifies the vaporizer structure, facilitates easier replacement, and allows for integration with other gas panels, while maintaining efficient vaporization and flow control without conduits, improving overall system efficiency and reliability.
Implementation Method 1
a vaporizer that vaporizes a liquid material
Implementation Method 2
vaporizes this liquid material by heating it
Implementation Method 3
a preheater that preheats the liquid material that is supplied to the vaporizer to a predetermined temperature
Data Source
AI summary
The present invention makes it possible to reduce the size of a vaporization system by eliminating the need for conduits in the vaporization system, without it being necessary to form a flow path in order for a supply rate controller to be mounted inside a vaporizer, and is formed by a vaporizer that vaporizes a liquid material; a supply rate controller that controls a supply rate of the liquid material to the vaporizer; and a manifold block inside which an internal flow path is formed, and that has a device mounting surface on which both the vaporizer and the supply rate controller are mounted, wherein, as a result of the vaporizer and the supply rate controller being mounted on the device mounting surface, they are connected together via the flow path.