Manipulator Head Vacuum Pump Layout for Liquid Transfer Below 600 Mbar
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Solution Overview
Problem
Existing vacuum systems struggle to efficiently pump liquids from electrochemical cells at pressures below 600 mbar without breaking the vacuum, leading to contamination and operational interruptions.
Innovation Solution
A manipulator head with a compact design that integrates a liquid cell and pump, minimizing the distance between the cell outlet and pumping section to enable liquid flow at pressures as low as 100 mbar, using a peristaltic pump with rollers or sliding shoes, and optimizing fluid line parameters to reduce pressure loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a robot system is designed to be adaptable to different work environments and tasks, then versatility is improved, but device complexity increases due to multiple sensors and actuators required
Solution Approach 1:
The patent implements a universal manipulator head design that can perform multiple functions across different work environments. The head unit integrates various sensors (force, torque, vision) and actuators into a single modular platform that can be deployed for assembly, inspection, and handling tasks in diverse settings including space stations and manufacturing facilities, eliminating the need for separate specialized systems
2Weight of moving object
If the manipulator head is designed to be compact and lightweight for space applications, then weight and volume are reduced, but the integration of multiple sensors and actuators becomes more difficult
Solution Approach 1:
The patent merges multiple sensors and actuators into a single integrated head unit. The force sensor, torque sensor, and vision sensor are combined within one compact housing, along with the drive mechanism and control electronics. This consolidation reduces the overall weight and volume while simplifying integration compared to separate distributed components
Solution Approach 2:
The patent employs a nested arrangement where smaller components are housed within larger structures. The vision sensor is positioned within the head unit housing, the force and torque sensors are integrated into the actuator assembly, and control electronics are nested within the drive mechanism. This nesting approach minimizes external volume while maintaining functional independence of each sensor and actuator
3Adaptability or versatility
If sensors and actuators are distributed throughout the robot system, then adaptability is improved, but reliability decreases due to more potential failure points
Solution Approach 1:
The patent combines multiple sensors and actuators into a single integrated head unit with centralized control electronics. This consolidation reduces the total number of connection points and potential failure interfaces between components while maintaining the ability to perform multiple tasks through coordinated operation of the integrated sensors and actuators
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient liquid exchange and measurement at varying liquid levels within the cell without increasing pressure, preventing contamination and allowing continuous operation at low pressures, facilitating analysis with an illumination and detection system.
Implementation Method 1
a vacuum pump that creates a vacuum environment inside the head unit, thereby enabling the held state of a processed object such as a semiconductor wafer
Data Source
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AI summary
The invention relates to pumping liquids (18) in a vacuum system at a negative pressure, in particular at an absolute pressure of below 600 mbar. For this purpose, a manipulator head (10') is provided for use in a vacuum housing at a negative pressure. The manipulator head (10') contains a liquid cell (12) and a liquid pump (14). The liquid cell (12) has a liquid cell outlet (22) and an interior space (16) that is designed for negative pressure and designed to receive a liquid (18). The liquid pump (14) has a liquid pumping region (26) which is fluidically connected to the fluid cell outlet (22) and is designed to pump the liquid (18) out of the liquid pumping region (26) when there is negative pressure in the interior space (16) of the liquid cell (12). A distance (d') between the liquid cell outlet (22) of the liquid cell (12) and the liquid pumping region (26) of the liquid pump (14) is selected such that at an absolute pressure of below 600 mbar in the interior space (16) of the liquid cell (12), the liquid (18) extends at least as far as the liquid pumping region (26) of the liquid pump (14), so that the latter can pump the liquid (18). This makes it possible to construct a compact vacuum system that can circulate liquid (18) at an absolute pressure of below 600 mbar and in particular can also be drained.