Mask Assembly Adsorption Holes Deposition Precision
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current mask assemblies for depositing functional layers in display panels lack precision in deposition openings, leading to suboptimal deposition quality of patterned layers, necessitating improved processing techniques and mask designs for enhanced accuracy.
Innovation Solution
A mask assembly comprising a frame with an open sheet and masks having deposition openings, where the masks overlap adsorption holes on the open sheet, with specific geometric configurations and materials like invar, and a manufacturing method involving vacuum-assisted alignment and welding for precise coupling, enhancing deposition precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional mask assemblies are used for depositing functional layers, then the deposition process can be completed, but the deposition precision and quality of patterned layers are suboptimal
Solution Approach 1:
The mask assembly is segmented into multiple components: a frame, an open sheet with adsorption holes, and separate masks with deposition openings. This segmentation allows each component to be optimized independently for precision while simplifying the overall manufacturing process through modular assembly.
Solution Approach 2:
The open sheet is prepared in advance with adsorption holes positioned at specific locations. During assembly, masks are aligned and adsorbed onto the open sheet before the actual deposition process, ensuring precise positioning is established beforehand rather than during deposition.
2Reliability
If masks are physically connected to the open sheet without adsorption holes, then the structure is simpler, but the adhesive force and alignment precision are insufficient
Solution Approach 1:
The adsorption mechanism utilizes vacuum pressure differential to create strong adhesive force between the masks and the open sheet. Adsorption holes allow vacuum to be applied, causing the masks to be firmly held in place through atmospheric pressure differential, providing reliable adhesion without complex mechanical fastening systems.
3Manufacturing precision
If deposition openings are not precisely aligned with the pattern requirements, then the mask can be manufactured more easily, but the deposition quality of patterned functional layers deteriorates
Solution Approach 1:
The open sheet serves as an intermediary component between the frame and the masks. It provides a reference structure with adsorption holes that facilitate precise alignment and positioning of the masks during assembly, ensuring that deposition openings are accurately positioned relative to the underlying substrate patterns.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves deposition precision and simplifies the manufacturing process, resulting in higher quality patterned functional layers on display panels by ensuring accurate alignment and increased adhesive force between the mask and open sheet during the deposition process.
Implementation Method 1
hole groups, each of which includes adsorption holes spaced apart from a corresponding sheet opening among the sheet openings
Implementation Method 2
Each of the masks may overlap the adsorption holes of a corresponding hole group among the hole groups
Implementation Method 3
a deposition source spraying a deposition material toward the mask assembly
Data Source
AI summary
A mask assembly including a frame including a frame opening, an open sheet physically connected to the frame including sheet openings corresponding to the frame opening, and hole groups each of which includes adsorption holes spaced apart from a corresponding sheet opening among the sheet openings, and masks each of which includes deposition openings, and is physically connected to the open sheet so as to be aligned with a corresponding sheet opening among the sheet openings. Each of the masks may overlap the adsorption holes of a corresponding hole group among the hole groups.