Multi-Layer Mask Assembly for Display Deposition Clogging
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Solution Overview
Problem
Existing display device manufacturing processes face challenges in thickness adjustment, durability enhancement, and minimizing clogging phenomena during deposition material passage, particularly in the design of mask assemblies used in display device manufacturing.
Innovation Solution
A mask assembly is designed with a multi-layer structure comprising a first mask layer and a second mask layer, where the second mask layer includes inorganic and organic layers, allowing for adjustable thickness and improved durability, and featuring overlapping openings to reduce material accumulation and clogging, with the second mask layer's organic layer being thicker than the inorganic layers, enabling efficient deposition material passage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single-layer mask structure is used, then the device complexity is low, but the durability and thickness adjustability are insufficient
Solution Approach 1:
The mask assembly is divided into multiple independent layers (first mask layer, second mask layer with inorganic and organic sub-layers) that can be separately manufactured and assembled. This segmentation allows each layer to be optimized for specific functions while maintaining overall durability and thickness adjustability.
Solution Approach 2:
The mask assembly combines different materials (inorganic materials for structural stability and organic materials for flexibility and thickness adjustment) to create a composite structure that achieves both durability and adaptability without excessive complexity.
2Productivity
If a single opening structure is used, then the manufacturing process is simple, but clogging phenomenon occurs during deposition material passage
Solution Approach 1:
The single opening is segmented into multiple openings across different layers (first opening in first mask layer, second opening in second mask layer) that overlap to form a through-opening. This segmentation prevents material accumulation at any single point, reducing clogging while maintaining manufacturing efficiency.
Solution Approach 2:
The opening structure transitions from a two-dimensional planar opening to a three-dimensional overlapping opening system across multiple layers. This dimensional change allows deposition material to pass through multiple pathways, preventing clogging while keeping the manufacturing process straightforward.
3Reliability
If the organic layer thickness is increased, then the durability is improved, but the deposition material passage efficiency may be affected
Solution Approach 1:
The thickness of the organic layer is optimized within a specific range to achieve the balance between durability and deposition material passage efficiency. By controlling the organic layer thickness parameter, the mask assembly maintains structural integrity while allowing sufficient material flow.
Solution Approach 2:
The combination of inorganic and organic layers creates a composite structure where the inorganic layer provides structural support and the organic layer provides flexibility and controlled permeability, achieving both durability and efficient material passage without requiring excessive organic layer thickness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the durability of the mask assembly and reduces clogging, thereby improving the manufacturing efficiency and longevity of the display device manufacturing process without the need for separate cleaning processes.
Implementation Method 1
a deposition source unit that is disposed inside the chamber to face the mask assembly and supplies a deposition material, and deposits the deposition material on the display substrate by passing through the mask assembly
Data Source
AI summary
An apparatus for manufacturing a display device includes a chamber, a mask assembly disposed inside the chamber to face a display substrate, and a deposition source unit that is disposed inside the chamber to face the mask assembly, supplies a deposition material, and deposits the deposition material on the display substrate by passing through the mask assembly, wherein the mask assembly includes a first mask layer including a first mask opening, and a second mask layer disposed on the first mask layer and including a second mask opening overlapping the first mask opening, and the second mask layer includes a first inorganic layer, a first organic layer disposed on the first inorganic layer, and a second inorganic layer disposed on the first organic layer.