Multi-Layer Mask Assembly for Display Deposition Precision
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Solution Overview
Problem
Existing display apparatus manufacturing technologies face challenges in achieving precise deposition of patterns while preventing the shadow phenomenon, which affects the quality and resolution of the display.
Innovation Solution
A mask assembly is designed with a layered structure comprising a first metal layer, a second metal layer, a third metal layer, and a fourth metal layer, where the first and third layers include invar for thermal stability and mechanical strength, and the second and fourth layers include tantalum nitride and titanium nitride respectively, to prevent thermal deformation and ensure precise deposition through a series of etching processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single-layer mask structure is used, then the manufacturing process is simple, but the deposition precision and shadow phenomenon prevention are insufficient
Solution Approach 1:
The mask structure is divided into multiple functional layers (first metal layer for support, second metal layer for pattern formation, third metal layer for shadow prevention, fourth metal layer for protection) instead of using a single-layer structure. Each layer serves a specific function, collectively achieving high deposition precision while maintaining manageable manufacturing complexity through specialized division of labor.
Solution Approach 2:
The mask employs composite material construction with different metal layers (invar, tantalum nitride, titanium nitride) each selected for specific properties. This composite structure combines thermal stability, mechanical strength, and shadow phenomenon prevention capabilities that cannot be achieved with a single material, thereby improving deposition precision.
2Object-affected harmful factors
If the mask sheet thickness is increased to prevent shadow phenomenon, then shadow phenomenon is reduced, but the deposition precision and pattern accuracy deteriorate
Solution Approach 1:
Instead of using a single thick mask layer, the structure segments the thickness function across multiple layers: the first metal layer provides mechanical support, while the third metal layer specifically addresses shadow phenomenon prevention. This segmentation allows the active pattern-forming layers to remain thin for high precision while the support structure provides necessary thickness for shadow prevention.
Solution Approach 2:
Different regions of the mask structure have different thicknesses and material properties optimized for their specific functions. The first metal layer has greater thickness for structural support, while the second and fourth metal layers have smaller thicknesses for precise pattern formation and protection, respectively. This local optimization prevents shadow phenomenon while maintaining pattern accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise pattern deposition and prevents the shadow phenomenon, enhancing the resolution and quality of the display apparatus by maintaining mechanical strength and thermal stability, while ensuring the deposition material passes through a thin, efficient opening structure.
Implementation Method 1
a first metal layer arranged on the mask frame and including a first opening, a second metal layer arranged on the first metal layer and including a plurality of second openings overlapping the first opening in a plan view, a third metal layer arranged on the second metal layer and including a plurality of third openings overlapping the first opening in a plan view
Implementation Method 2
depositing a deposition material on the display substrate by passing through the mask assembly
Data Source
AI summary
A mask assembly includes a mask frame including an opening area and a mask sheet. The mask sheet includes a first metal layer arranged on the mask frame and including a first opening, a second metal layer arranged on the first metal layer and including a plurality of second openings overlapping the first opening in a plan view, a third metal layer arranged on the second metal layer and including a plurality of third openings overlapping the first opening in a plan view, and a fourth metal layer arranged on the third metal layer and including a plurality of fourth openings overlapping the first opening in a plan view.